# US 12,114,402 B2 · Holding device and method of manufacturing holding device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,114,402 B2 - Document ID: US12114402B2 - Status: Granted - Kind: B2 - Application number: 16/975,607 - Filed: 2019-11-13 - Published: 2020-12-24 - Granted: 2024-10-08 - Earliest claimed: 2018-11-19 - Assignees: Niterra Co., Ltd. - Applicants: Ngk Spark Plug Co., Ltd. - Inventors: Ryunosuke Sakamaki; Katsuya Takaoka; Hiroshi Watanabe - Web page: https://patentgrep.com/patent/US12114402B2 ## CPC - H05B 3/12: characterised by the composition or nature of the conductive material - C04B 35/581: based on aluminium nitride - C04B 35/645: Pressure sintering - C04B 37/005: {consisting of glass or ceramic material} - H05B 3/03: Electrodes - H05B 3/06: Heater elements structurally combined with coupling elements or holders - H05B 3/20: Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater (H05B3/62, H05B3/68, H05B3/78, H05B3/84 take precedence) - H05B 3/283: {the insulating material being an inorganic material, e.g. ceramic} - H05B 3/74: Non-metallic plates {, e.g. vitroceramic, ceramic or glassceramic hobs, also including power or control circuits} - H10P 72/7616: {characterised by a coating, a hardness or a material} - C04B 2235/3225: Yttrium oxide or oxide-forming salts thereof - C04B 2235/6567: Treatment time - C04B 2237/064: based on alumina or aluminates - C04B 2237/09: wherein the active component for bonding is not the largest fraction of the interlayer - C04B 2237/343: Alumina or aluminates - C04B 2237/366: Aluminium nitride - C04B 2237/704: of one or more of the ceramic layers or articles - C04B 2237/76: Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc - C04B 2237/86: Joining of two substrates at their largest surfaces, one surface being complete joined and covered, the other surface not, e.g. a small plate joined at it's largest surface on top of a larger plate - H05B 2203/016: Heaters using particular connecting means - H10P 72/0432: {mainly by conduction} - H10P 72/70: for supporting or gripping - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL - C04B: LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE {(roofing granules E04D7/005)}; CERAMICS (devitrified glass-ceramics C03C10/00); REFRACTORIES; TREATMENT OF NATURAL STONE - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A holding device including a ceramic member formed of a sintered ceramic material containing aluminum nitride as a main component, a heating resistor element formed of a metal and disposed in the ceramic member, and an electrically conductive electricity supply member in contact with the heating resistor element. The holding device holds an object on the surface of the ceramic member. In the holding device, at least a portion of the surface of the heating resistor element, excluding its contact surface for contact with the electricity supply member, is covered with a coat layer formed of a nitride containing at least one of Al, Ti, Zr, V, Ta, and Nb. Also disclosed is a method of manufacturing the holding device. ## Claims ### Claim 1 A holding device comprising: a ceramic member having a first surface approximately perpendicular to a first direction and formed of a sintered ceramic material containing aluminum nitride as a main component; a heating resistor element formed of a metal and disposed in the ceramic member; an electricity supply connection member which is electrically conductive and is in contact with the heating resistor element; and an electricity supply terminal which is electrically conductive and is electrically connected to the electricity supply connection member, the holding device being adapted to hold an object on the first surface of the ceramic member and being characterized in that at least a portion of a surface of the heating resistor element, excluding its contact surface for contact with the electricity supply connection member, is covered with a coat layer formed of a nitride selected from the group consisting of AlN, AlTiN, AlTiSiN, AlZrN, AlTiCrN, VN, and NbN. ### Claim 2 (depends on 1) A holding device according to claim 1, wherein the coat layer has a thickness of 0.3 μm to 60 μm. ### Claim 3 (depends on 1) A holding device according to claim 1, wherein, in at least one cross section parallel to the first direction, pores present at an interface between the heating resistor element and the coat layer have an average diameter of 10 μm or less. ### Claim 4 (depends on 1) A holding device according to claim 1, wherein, in at least one cross section parallel to the first direction, the ratio of a sectional area of a carbide layer formed on the surface of the heating resistor element to a sectional area of the heating resistor element is 10% or less. ### Claim 5 (depends on 4) A holding device according to claim 4, wherein, in at least one cross section parallel to the first direction, the ratio of a sectional area of a carbide layer formed on the surface of the heating resistor element to a sectional area of the heating resistor element is 3% or less. ### Claim 6 (depends on 1) A holding device according to claim 1, wherein the electricity supply member contains no organic substance. ### Claim 7 (depends on 1) A holding device according to claim 1, wherein the heating resistor element has a mesh shape. ### Claim 8 A method of manufacturing a holding device which comprises a ceramic member having a first surface approximately perpendicular to a first direction and formed of a sintered ceramic material containing aluminum nitride as a main component, a heating resistor element formed of a metal and disposed in the ceramic member, an electricity supply connection member which is electrically conductive and is in contact with the heating resistor element; and an electricity supply terminal which is electrically conductive and is electrically connected to the electricity supply connection member, and which holds an object on the first surface of the ceramic member, the method being characterized by comprising the steps of: forming a coat layer which is a nitride selected from the group consisting of AlN, AlTiN, AlTiSiN, AlZrN, AlTiCrN, VN, and NbN on at least a portion of a surface of the heating resistor element, excluding its contact surface for contact with the electricity supply connection member; and forming, through firing, the ceramic member in which the electricity supply member and the heating resistor element having the coat layer formed thereon are disposed.