# US 12,114,083 B2 · Smart camera substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,114,083 B2 - Document ID: US12114083B2 - Status: Granted - Kind: B2 - Application number: 18/214,417 - Filed: 2023-06-26 - Published: 2023-10-26 - Granted: 2024-10-08 - Earliest claimed: 2020-09-15 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Upendra Ummethala; Philip Kraus; Keith Berding; Blake Erickson; Patrick Tae; Devendra Channappa Holeyannavar; Shivaraj Manjunath Nara; Anandakumar Parameshwarappa; Sivasankar Nagarajan; Dhirendra Kumar - Web page: https://patentgrep.com/patent/US12114083B2 ## CPC - H04N 23/90: Arrangement of cameras or camera modules, e.g. multiple cameras in TV studios or sports stadiums - H10P 72/0604: {Process monitoring, e.g. flow or thickness monitoring} - H04N 23/56: provided with illuminating means - H04N 23/60: Control of cameras or camera modules - H10P 72/0612: {Production flow monitoring, e.g. for increasing throughput} - H04N 23/555: {for picking-up images in sites, inaccessible due to their dimensions or hazardous conditions, e.g. endoscopes or borescopes} - H10P 72/0602: {Temperature monitoring} - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller. ## Claims ### Claim 1 A diagnostic substrate, comprising: a baseplate, the baseplate having a global plane; and a plurality of image sensors on the baseplate, wherein the plurality of image sensors comprises circumferentially alternating first image sensors and second image sensors, each of the first image sensors having a field of view in a direction at a zero angle with respect to the global plane of the baseplate, and each of the second image sensors having a field of view in a direction at a non-zero angle with respect to the global plane of the baseplate. ### Claim 2 (depends on 1) The diagnostic substrate of claim 1, further comprising: a printed circuit board (PCB) on the baseplate. ### Claim 3 (depends on 2) The diagnostic substrate of claim 2, further comprising: a controller on the baseplate, wherein the PCB electrically couples the controller to the plurality of image sensors. ### Claim 4 (depends on 1) The diagnostic substrate of claim 1, further comprising: a light source. ### Claim 5 (depends on 4) The diagnostic substrate of claim 4, wherein the light source comprises a plurality of light emitting diodes (LEDs). ### Claim 6 (depends on 5) The diagnostic substrate of claim 5, wherein the plurality of LEDs are individually controllable or controllable in groups. ### Claim 7 (depends on 1) The diagnostic substrate of claim 1, further comprising: a battery. ### Claim 8 (depends on 7) The diagnostic substrate of claim 7, wherein the battery is housed within a hermetically sealed enclosure. ### Claim 9 (depends on 8) The diagnostic substrate of claim 8, further comprising: a pressure sensor or a volatile organic compound (VOC) sensor within the hermetically sealed enclosure. ### Claim 10 (depends on 1) The diagnostic substrate of claim 1, further comprising: a temperature sensor or a vibration sensor. ### Claim 11 (depends on 3) The diagnostic substrate of claim 3, further comprising: a diffuser cover over the baseplate, the PCB, and the controller. ### Claim 12 (depends on 1) The diagnostic substrate of claim 1, wherein a thickness of the diagnostic substrate is less than 10 mm. ### Claim 13 (depends on 1) The diagnostic substrate of claim 1, wherein the image sensors allow for imaging in the visible spectrum and thermal imaging. ### Claim 14 A method of imaging the interior of a chamber, comprising: providing a diagnostic substrate, wherein the diagnostic substrate comprises a plurality of image sensors and a light source, the image sensors on a base plate having a global plane, wherein the plurality of image sensors comprises circumferentially alternating first image sensors and second image sensors, each of the first image sensors having a field of view in a direction at a zero angle with respect to the global plane of the baseplate, and each of the second image sensors having a field of view in a direction at a non-zero angle with respect to the global plane of the baseplate; inserting the diagnostic substrate into the chamber, wherein the chamber is maintained at a sub-atmospheric pressure; turning on the light source; and obtaining images of an interior of the chamber with the plurality of image sensors. ### Claim 15 (depends on 14) The method of claim 14, wherein a multiplexer architecture is used to obtain images from each of the image sensors. ### Claim 16 (depends on 14) The method of claim 14, further comprising: stitching two or more of the obtained images together to provide a stitched image. ### Claim 17 (depends on 14) The method of claim 14, further comprising: logging temperature levels at given times to predict failure of a battery or conditions that trigger replacement of the battery. ### Claim 18 (depends on 14) The method of claim 14, wherein machine learning is applied to image data from the interior of the chamber to recognize chamber drift over time and/or to trigger cleaning or other maintenance items.