# US 12,113,326 B2 · Laser device and electronic device manufacturing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,113,326 B2 - Document ID: US12113326B2 - Status: Granted - Kind: B2 - Application number: 17/817,839 - Filed: 2022-08-05 - Published: 2022-11-24 - Granted: 2024-10-08 - Earliest claimed: 2020-03-19 - Assignees: Gigaphoton Inc. - Applicants: Gigaphoton Inc. - Inventors: Yoichi Sasaki; Kouji Kakizaki; Hakaru Mizoguchi - Web page: https://patentgrep.com/patent/US12113326B2 ## CPC - H01S 3/036: Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube {(H01S3/031 takes precedence)} - G03F 7/2006: {using coherent light; using polarised light} - G03F 7/70025: {by lasers} - H01S 3/038: Electrodes, e.g. special shape, configuration or composition - H01S 3/225: comprising an excimer or exciplex - H01S 3/2256: {KrF, i.e. krypton fluoride is comprised for lasing around 248 nm} - H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A laser device according to an aspect of the present disclosure includes a chamber into which laser gas is introduced; a pair of electrodes arranged in the chamber; a power source configured to apply a voltage between the electrodes; a nozzle structure which includes an internal passage for receiving the laser gas and a slit connected to the internal passage and is configured to generate flow of the laser gas between the electrodes due to the laser gas blowing out from the slit; a gas flow path which has a suction port through which the laser gas in the chamber is suctioned and introduces, to the nozzle structure, the laser gas suctioned through the suction port; and a blower device configured to cause the laser gas to blow toward the internal passage of the nozzle structure through the gas flow path. ## Claims ### Claim 1 A laser device, comprising: a chamber into which laser gas is introduced; a pair of electrodes arranged in the chamber; a power source configured to apply a voltage between the electrodes; a nozzle structure which includes an internal passage for receiving the laser gas and a slit connected to the internal passage and is configured to generate flow of the laser gas between the electrodes due to the laser gas blowing out from the slit; a gas flow path which has a suction port through which the laser gas in the chamber is suctioned and introduces, to the nozzle structure, the laser gas suctioned through the suction port; and a blower device configured to cause the laser gas to blow toward the internal passage of the nozzle structure through the gas flow path. ### Claim 2 (depends on 1) The laser device according to claim 1, wherein at least a part of the slit is arranged in a space extending a discharge space between the electrodes in a first direction being a short-side direction of the electrodes. ### Claim 3 (depends on 2) The laser device according to claim 2, wherein at least a part of the slit is parallel to a second direction being a longitudinal direction of the electrodes. ### Claim 4 (depends on 3) The laser device according to claim 3, wherein the slit includes a first slit and a second slit, the first slit and the second slit are arranged as being distanced in a third direction being a direction in which the pair of electrodes are faced to each other, and a distance between the first slit and the second slit in the third direction is smaller than a gap between the electrodes. ### Claim 5 (depends on 3) The laser device according to claim 3, wherein a length of the slit in the second direction is larger than a length of the electrodes in the second direction. ### Claim 6 (depends on 1) The laser device according to claim 1, wherein the nozzle structure is arranged on an upstream side of the electrodes with respect to flow of the laser gas flowing between the electrodes. ### Claim 7 (depends on 1) The laser device according to claim 1, wherein the nozzle structure is arranged on a downstream side of the electrodes with respect to flow of the laser gas flowing between the electrodes. ### Claim 8 (depends on 1) The laser device according to claim 1, wherein the nozzle structure includes a first nozzle structure and a second nozzle structure, the first nozzle structure is arranged on an upstream side of the electrodes with respect to flow of the laser gas flowing between the electrodes, and the second nozzle structure is arranged on a downstream side of the electrodes with respect to the flow of the laser gas flowing between the electrodes. ### Claim 9 (depends on 8) The laser device according to claim 8, wherein the first nozzle structure includes a third slit and a fourth slit as the slit, the second nozzle structure includes a fifth slit and a sixth slit as the slit, the third slit and the fourth slit are arranged as being distanced in a third direction being a direction in which the pair of electrodes are faced to each other, the fifth slit and the sixth slit are arranged as being distanced in the third direction, and a distance between the fifth slit and the sixth slit in the third direction is larger than a distance between the third slit and the fourth slit in the third direction. ### Claim 10 (depends on 1) The laser device according to claim 1, wherein the nozzle structure is ring-shaped, and the slit is provided on an inner circumferential surface of the ring-shaped nozzle structure. ### Claim 11 (depends on 1) The laser device according to claim 1, wherein the nozzle structure is bar-shaped. ### Claim 12 (depends on 1) The laser device according to claim 1, further comprising a dust filter arranged on a path on which the laser gas flows. ### Claim 13 (depends on 1) The laser device according to claim 1, further comprising: a corona outer electrode connected to the electrode and the nozzle structure, and a corona inner electrode arranged in the nozzle structure. ### Claim 14 (depends on 1) The laser device according to claim 1, wherein the nozzle structure is made of an insulating material. ### Claim 15 (depends on 1) The laser device according to claim 1, wherein the blower device includes a fan and a motor to rotate the fan. ### Claim 16 (depends on 1) The laser device according to claim 1, wherein the blower device includes a compressor. ### Claim 17 (depends on 1) The laser device according to claim 1, wherein the laser gas includes fluorine. ### Claim 18 (depends on 1) The laser device according to claim 1, wherein at least a part of the gas flow path is provided outside the chamber. ### Claim 19 (depends on 1) The laser device according to claim 1, wherein the gas flow path is provided in the chamber, and the laser gas is circulated in the chamber. ### Claim 20 An electronic device manufacturing method, comprising: generating laser light using a laser device; outputting the laser light to an exposure apparatus; and exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device, the laser device including: a chamber into which the laser gas is introduced; a pair of electrodes arranged in the chamber; a power source configured to apply a voltage between the electrodes; a nozzle structure which includes an internal passage for receiving the laser gas and a slit connected to the internal passage and is configured to generate flow of the laser gas between the electrodes due to the laser gas blowing out from the slit; a gas flow path which has a suction port through which the laser gas in the chamber is suctioned and introduces, to the nozzle structure, the laser gas suctioned through the suction port; and a blower device configured to cause the laser gas to blow toward the internal passage of the nozzle structure through the gas flow path.