# US 12,113,145 B2 · Avalanche photodetector (variants) and method for manufacturing the same (variants) > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,113,145 B2 - Document ID: US12113145B2 - Status: Granted - Kind: B2 - Application number: 17/427,143 - Filed: 2020-03-04 - Published: 2022-03-31 - Granted: 2024-10-08 - Earliest claimed: 2019-03-12 - Assignees: Dephan LLC - Applicants: Dephan LLC - Inventors: Nikolai Afanasevich Kolobov; Konstantin Yurevich Sitarskiy; Vitalii Emmanuilovich Shubin; Dmitrii Alekseevich Shushakov; Sergei Vitalevich Bogdanov - Web page: https://patentgrep.com/patent/US12113145B2 ## CPC - H10F 30/225: the potential barrier working in avalanche mode, e.g. avalanche photodiodes - H10F 39/103: {the at least one element covered by H10F30/00 having potential barriers, e.g. integrated devices comprising photodiodes or phototransistors} - H10F 71/121: {The active layers comprising only Group IV materials} - H10F 77/244: {made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers} - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION ## Abstract An avalanche photodetector (APD) is proposed, wherein a photoconverter and at least one avalanche amplifier are located on the same wafer, its multiplication layer covers the entire surface of the conductive wafer, and its contact layer is formed in some region of the multiplication layer. Outside the contact layer, the multiplication layer functions as a photoconverter, thus facilitating the photocarriers getting into the avalanche amplifier. A dielectric-filled circular groove surrounding the avalanche amplifier suppresses photoelectric communication noises generated by neighboring avalanche amplifiers, thus allowing to manufacture multi-channel avalanche instruments with higher threshold sensitivity. ## Claims ### Claim 1 A method of manufacturing an avalanche photodetector, the method comprising: forming a multiplication layer on an entire top surface of a semiconductor wafer, etching a closed groove on a top surface of the multiplication layer, so that a depth of the closed groove is greater than or equal to a thickness of the multiplication layer, but is smaller than a total thickness of the semiconductor wafer and the multiplication layer combined; filling the closed groove with highly-doped polycrystalline silicon of the same conductivity type as the multiplication layer; forming a photodetector inside a region bounded by the closed groove, the photodetector comprising an avalanche amplifier and a photoconverter; forming at least one avalanche amplifier in the top surface of the multiplication layer in an area bounded by the closed groove, by (i) etching a circular groove inside a region of the multiplication layer bounded by the closed groove, wherein the circular groove defines the avalanche amplifier, and wherein a depth of the circular groove is less than a thickness of the multiplication layer; (ii) filling the circular groove with a dielectric material; (iii) putting a dielectric layer onto surfaces of the multiplication layer and the circular groove; (iv) filling a window in the dielectric layer with highly doped polycrystalline silicon having an opposite conductivity of the multiplication layer; (v) placing a contact layer of the avalanche amplifier inside a region bounded by the circular groove, so that the photoconverter is outside the region bounded by the circular groove, such that the photoconverter and the avalanche amplifier are laterally adjacent to each other; forming a high-resistance layer on the contact layer of the avalanche amplifier; forming a first electrode made of a transparent material over the high-resistance layer and the dielectric layer; forming a second electrode on a bottom surface of the semiconductor wafer; and wherein the high-resistance layer has a resistance of at least 1 megaohm/μm2 at a layer thickness 100 nm. ### Claim 2 (depends on 1) The method of claim 1, wherein the semiconductor wafer is made of a low-resistance material with a dopant concentration of at least 1019 cm−3. ### Claim 3 (depends on 1) The method of claim 1, wherein the multiplication layer is formed using an epitaxy method. ### Claim 4 (depends on 1) The method of claim 1, wherein both the semiconductor wafer and the multiplication layer are made of the same semiconductor material. ### Claim 5 (depends on 1) The method of claim 1, wherein the contact layer is made by doping the multiplication layer with a dopant that forms a layer with an opposite conductivity. ### Claim 6 (depends on 1) The method of claim 1, wherein the closed groove has a width of 1.5 μm to 2.0 μm. ### Claim 7 (depends on 5) The method of claim 5, wherein the contact layer is formed by doping the multiplication layer with a dopant concentration of at least 1019 cm−3. ### Claim 8 (depends on 1) The method of claim 1, wherein the closed groove has a width of 1.5 μm to 2.0 μm. ### Claim 9 (depends on 5) The method of claim 5, wherein the contact layer is formed through diffusion of a dopant from the highly-doped polycrystalline silicon that is inside the circular groove. ### Claim 10 A method of manufacturing an avalanche photodetector, the method comprising: forming a multiplication layer on a semiconductor wafer, etching a closed groove on a top surface of the multiplication layer, so that a depth of the closed groove is smaller than a total thickness of the semiconductor wafer and the multiplication layer combined; filling the closed groove with highly-doped polycrystalline silicon of the same conductivity type as the multiplication layer; forming at least one avalanche amplifier in the top surface of the multiplication layer in an area bounded by the closed groove, by (i) etching a circular groove inside a region of the multiplication layer bounded by the closed groove, wherein the circular groove defines the avalanche amplifier, and wherein a depth of the circular groove is less than a thickness of the multiplication layer; (ii) filling the circular groove with a dielectric material; (iii) putting a dielectric layer onto surfaces of the multiplication layer and the circular groove; (iv) creating a window in the dielectric layer inside the circular groove; (v) filling the window with highly doped polycrystalline silicon having an opposite conductivity of the multiplication layer; (vi) forming a contact layer of an avalanche amplifier through diffusion of the highly-doped polycrystalline silicon into the multiplication layer inside a region bounded by the circular groove, so as to form a photoconverter layer outside the region bounded by the circular groove and inside the closed groove; forming a high-resistance layer on the contact layer of the avalanche amplifier; forming a first electrode made of a transparent material over the high-resistance layer and the dielectric layer; and forming a second electrode on a bottom surface of the semiconductor wafer; and wherein the high-resistance layer has a resistance of at least 1 megaohm/μm2 at a layer thickness 100 nm. ### Claim 11 (depends on 10) The method of claim 10, wherein the semiconductor wafer is made of a low-resistance material with a dopant concentration of at least 1019 cm−3. ### Claim 12 (depends on 10) The method of claim 10, wherein the multiplication layer is formed using epitaxy. ### Claim 13 (depends on 10) The method of claim 10, wherein both the semiconductor wafer and the multiplication layer are made of the same semiconductor material. ### Claim 14 (depends on 10) The method of claim 10, wherein the contact layer is formed by doping the multiplication layer with a dopant concentration of at least 1019 cm−3. ### Claim 15 (depends on 10) The method of claim 10, wherein the closed groove has a width of 1.5 μm to 2.0 μm.