# US 12,113,144 B2 · Arrangement for an antenna for generating or receiving terahertz radiation, antenna, terahertz system, and method for producing an arrangement for an antenna > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,113,144 B2 - Document ID: US12113144B2 - Status: Granted - Kind: B2 - Application number: 17/998,096 - Filed: 2021-05-05 - Published: 2024-04-25 - Granted: 2024-10-08 - Earliest claimed: 2020-05-07 - Assignees: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. - Applicants: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. - Inventors: Björn Globisch; Robert Kohlhaas - Web page: https://patentgrep.com/patent/US12113144B2 ## CPC - H10F 30/21: the devices being sensitive to infrared, visible or ultraviolet radiation - H01Q 1/2283: {mounted in or on the surface of a semiconductor substrate as a chip-type antenna or integrated with other components into an IC package} - H01Q 5/22: RF wavebands combined with non-RF wavebands, e.g. infrared or optical - H10F 71/139: {using temporary substrates} - H10F 77/1248: {having three or more elements, e.g. GaAlAs, InGaAs or InGaAsP} - H10F 77/407: {indirectly associated with the devices} - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION - H01Q: ANTENNAS, i.e. RADIO AERIALS (radiators or antennas for microwave heating H05B6/72) ## Abstract An arrangement for an antenna for generating or receiving terahertz radiation can comprise a photoactive layer which can be activated by optical radiation in the range 1200 nm to 1700 nm, a substrate that is transparent to optical radiation and to which the photoactive layer is attached, and a first adhesion-promoting layer. The first adhesion-promoting layer is arranged between the photoactive layer and the substrate and connects them to each other, wherein first adhesion-promoting layer has a layer thickness of no more than 5 μm. The arrangement can also include and a carrier transparent to the optical radiation. The substrate is attached to the carrier and is arranged between the photoactive layer and the carrier. The substrate and the carrier can be made of the same material. ## Claims ### Claim 1 An arrangement for an antenna for generating or receiving terahertz radiation comprising: a photoactive layer that can be activated by optical radiation in a range of 1200 nm to 1700 nm, inclusive; a substrate transparent to the optical radiation, and to which the photoactive layer is attached; and a carrier transparent to the optical radiation, wherein the substrate is attached to the carrier and is arranged between the photoactive layer and the carrier, wherein the substrate and the carrier are made of the same material, wherein a first adhesion-promoting layer is arranged between the photoactive layer and the substrate such that the photoactive layer and the substrate layer are situated flat and flush with each other with the first adhesion-promoting layer therebetween, and wherein the first adhesion-promoting layer has a layer thickness of no more than 5 μm. ### Claim 2 (depends on 1) The arrangement according to claim 1, wherein at least one of the photoactive layer has a layer thickness of at most 10 μm, the substrate has a substrate thickness of at most 1 mm, or the carrier has a carrier thickness of at least 3 mm. ### Claim 3 (depends on 1) The arrangement according to claim 1, wherein at least one of the carrier and the substrate are made of silicon or wherein the photoactive layer is made at least predominantly of at least one of InGaAs, InAlAs, InGaAsP, InGaAlAs, InGaAlAsP, or GaAlAs and is doped with a transition metal. ### Claim 4 (depends on 1) The arrangement according to claim 1, wherein at least one of the substrate is embodied as a plane-parallel plate or the carrier is embodied as a plane-parallel body. ### Claim 5 (depends on 1) The arrangement according to claim 1, comprising: a lens for terahertz radiation, wherein the lens is attached to the carrier, or wherein the lens forms the carrier. ### Claim 6 (depends on 1) The arrangement according to claim 1, wherein a side of the photoactive layer facing away from the substrate is free of coating, at least in some regions, and is exposed to ambient air. ### Claim 7 An antenna for generating or receiving terahertz radiation comprising: an antenna arrangement for generating or receiving terahertz radiation; and an antenna conductor, the antenna conductor comprising: a first sub-structure; and a second sub-structure; wherein the antenna arrangement comprises: a photoactive layer that can be activated by optical radiation in a range of 1200 nm to 1700 nm, inclusive; a substrate transparent to the optical radiation attached to the photoactive layer; and a carrier transparent to the optical radiation attached to the substrate, arranged between the photoactive layer and the carrier, wherein the substrate and the carrier are made from identical material, wherein a first adhesion-promoting layer is arranged between the photoactive layer and the substrate such that the photoactive layer and the substrate are situated flat and flush with each other with the first adhesion-promoting layer therebetween, and wherein the first adhesion-promoting layer has a thickness of at most 5 μm; and wherein the first sub-structure and the second sub-structure are distanced from one another by a gap and contact the photoactive layer. ### Claim 8 (depends on 7) The antenna according to claim 7, wherein the antenna conductor is arranged on a side of the photoactive layer facing away from the substrate. ### Claim 9 (depends on 7) The antenna according to claim 7, wherein the first sub-structure and the second sub-structure are arranged on the substrate laterally next to the photoactive layer, and wherein the photoactive layer is arranged between the first sub-structure and the second sub-structure. ### Claim 10 (depends on 9) The antenna according to claim 9, wherein the photoactive layer has a footprint of at most 1 mm2. ### Claim 11 A terahertz system for generating and coherently detecting terahertz radiation comprising: a laser light source; and two terahertz (THz) antennas, wherein each of the THz antennas are optically coupled to the laser light source and can be activated by optical radiation from the laser light source, wherein a first of the antennas serves as a transmitting antenna and a second of the antennas serves as a receiving antenna, and wherein at least one of the transmitting antenna or the receiving antenna comprise: an antenna conductor comprising a first sub-structure and a second sub-structure; and an antenna arrangement comprising: a photoactive layer that can be activated by optical radiation in a range of 1200 nm to 1700 nm, inclusive; a substrate transparent to the optical radiation attached to the photoactive layer; and a carrier transparent to the optical radiation attached to the substrate, arranged between the photoactive layer and the carrier, wherein the substrate and the carrier are made from identical material, wherein a first adhesion-promoting layer is arranged between the photoactive layer and the substrate such that the photoactive layer and the substrate are situated flat and flush with each other with the first adhesion-promoting layer therebetween, and wherein the first adhesion-promoting layer has a thickness of at most 5 μm; and wherein the first sub-structure and the second sub-structure are distanced from one another by a gap and contact the photoactive layer, and wherein the antenna conductor is arranged on a side of the photoactive layer away from or toward the substrate. ### Claim 12 (depends on 11) The terahertz system according to claim 11, wherein the optical radiation of the laser light source has a wavelength of at least 1200 nm and/or at most 1700 nm. ### Claim 13 A method for producing an arrangement for an antenna for generating or receiving terahertz radiation, the method comprising: producing a photoactive layer on an auxiliary substrate which is at least predominantly formed from InP; connecting the photoactive layer flat to a substrate by means of a first adhesion-promoting layer which has a layer thickness of at most 5 μm; removing the auxiliary substrate, especially by chemical etching, and attaching the substrate to a carrier so that the substrate is arranged between the photoactive layer and the carrier, wherein the photoactive layer is activated by optical radiation in a range of 1200 nm to 1700 nm, wherein the substrate and the carrier are made of the same material, and wherein the substrate and the carrier are transparent to the optical radiation. ### Claim 14 (depends on 13) The method according to claim 13, wherein at least one of the photoactive layer is grown using of molecular beam epitaxy at a temperature of from 200° C. to 450° C., or the photoactive layer is epitaxially grown and is doped with a transition metal in a concentration of at least 1018 cm−3. ### Claim 15 (depends on 13) The method according to claim 13, comprising: applying an antenna conductor having a first sub-structure and a second sub-structure to the photoactive layer such that the two sub-structures are spaced apart from one another and contact the photoactive layer, wherein applying the antenna conductor to the photoactive layer is performed before connecting the photoactive layer to the substrate or after removing the auxiliary substrate. ### Claim 16 (depends on 2) The arrangement according to claim 2, wherein at least one of the photoactive layer had a thickness of at least 0.5 μm, the substrate has a substrate thickness of at least 0.2 mm, or the carrier has a carrier thickness of at least 5 mm. ### Claim 17 (depends on 5) The arrangement according to claim 5, wherein the lens is a plano-convex lens, a hemispherical lens, or a hyperhemispherical lens. ### Claim 18 (depends on 7) The antenna according to claim 7, wherein the antenna conductor is arranged on a side of the photoactive layer facing toward the substrate. ### Claim 19 (depends on 9) The antenna according to claim 9, wherein the photoactive layer has a footprint of at most 0.1 mm2. ### Claim 20 (depends on 9) The antenna according to claim 9, wherein the photoactive layer has a footprint of at most 0.01 mm2.