# US 12,113,057 B2 · Symmetric FET for RF nonlinearity improvement

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- Number: US 12,113,057 B2
- Document ID: US12113057B2
- Status: Granted
- Kind: B2
- Application number: 17/225,625
- Filed: 2021-04-08
- Published: 2021-10-28
- Granted: 2024-10-08
- Earliest claimed: 2018-04-13
- Assignees: pSemi Corporation
- Applicants: pSemi Corporation
- Inventors: Tero Tapio Ranta
- Web page: https://patentgrep.com/patent/US12113057B2

## CPC

- H10D 89/10: Integrated device layouts
- H10D 64/257: {for lateral devices wherein the source or drain electrodes are characterised by top-view geometrical layouts, e.g. interdigitated, semi-circular, annular or L-shaped electrodes (source or drain electrodes of TFTs H10D30/673)}
- H10D 84/811: {Combinations of field-effect devices and one or more diodes, capacitors or resistors}
- H10D 86/01: Manufacture or treatment
- H10D 86/03: wherein the substrate comprises sapphire, e.g. silicon-on-sapphire [SOS]
- H10D 86/201: {the substrates comprising an insulating layer on a semiconductor body, e.g. SOI (H10D86/40 take precedence)}
- H10W 20/0698: {Local interconnections}
- H10W 20/484: {Interconnections having extended contours, e.g. pads having mesh shape or interconnections comprising connected parallel stripes}
- H10W 44/20: at high-frequency [HF] or radio frequency [RF]
- H10W 44/601: {Capacitive arrangements (H10W44/20 takes precedence)}
- H10D 84/83: of only insulated-gate FETs [IGFET]
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A physical layout of a symmetric FET is described which provides symmetry in voltages coupled to structures of the FET so to reduce OFF state asymmetry in capacitances generated by the structures when the FET is used as a switch. According to one aspect, the symmetric FET is divided into two halves that are electrically coupled in parallel. Gate structures of the two half FETs are arranged in the middle region of the layout, each gate structure having gate fingers that project towards opposite directions. Interdigitated source and drain structures run along the gate fingers and include crossover structures that cross source and drain structures in the middle region of the layout. The gate structures share a body contact region that is arranged in the middle of the layout between the two gate structures.

## Claims

### Claim 1

A circuit, comprising:
a stack of a plurality of symmetric field effect transistors (FETs) arranged in a sequence from a first symmetric FET to a last symmetric FET, each of the plurality of symmetric FETs comprising:
two half FETs comprising a first half FET and a second half FET, the two half FETs connected in parallel with each other;
first and second gate structures each having respective N gate fingers defining respective N channels, N sources and N drains of each of the two half FETs;
a first source of the N sources of the first half FET formed at an outer edge of the first half FET opposite and immediately exterior of a first gate finger of the respective N gate fingers, and a first drain of the N drain fingers of the first half FET formed opposite and immediately interior of the first gate finger of the first half FET,
a first drain of the N drains of the second half FET formed at an outer edge of the first second FET opposite and immediately exterior of a first gate finger of the respective N gate fingers, and a first source of the N sources of the second half FET formed opposite and immediately interior of the first gate finger of the second half FET,
wherein:
the N sources of each of the first and second half FETs are connected, and the N drains of each of the first and second half FETs are connected,
the N sources of the first half FET and the N sources of the second half FET are connected together by two layers, and the N drains of the first half FET and the N drains of the second half FET are connected together by the two layers,
a source of a second symmetric FET of the stack is connected to a drain of the first symmetric FET of the stack, and
a source of each remaining symmetric FET of the stack is connected to a drain of a symmetric FET of the stack that is arranged immediately below according to the sequence.

### Claim 2 (depends on 1)

The circuit of claim 1, wherein at least one of the plurality of symmetric FETs comprises a body contact region arranged between the first and second gate structures and extending across a full width of the symmetric FET.

### Claim 3 (depends on 1)

The circuit of claim 1, wherein each pair of source and drain of the N sources and drains of the first half FET is connected to a respective pair of source and drain of the N sources and drains of the second half FET via a respective crossing structure formed on at least two layers of the symmetric FET.

### Claim 4 (depends on 1)

The circuit of claim 1, wherein at least one of the at least two layers comprises a sequence of alternating source crossing structures and drain crossing structures.

### Claim 5 (depends on 1)

The circuit of claim 1, wherein each of the two layers comprises a metal layer.

### Claim 6 (depends on 1)

The circuit of claim 1, wherein each of the at least two layers comprises only one of: a) source crossing structures, and b) drain crossing structures.

### Claim 7 (depends on 1)

The circuit of claim 1, further comprising a body contact region arranged between the first and second gate structures and extending across a full width of the symmetric FET.

### Claim 8 (depends on 7)

The circuit of claim 7, further comprising a first diode and a second diode symmetrically arranged along a respective edge of the first and second gate structures away from the body contact region, the first and second diodes respectively configured to provide a conduction path between the body contact region and the first and second gate structures.

### Claim 9 (depends on 7)

The circuit of claim 7, further comprising a diode arranged along an edge of one of the first gate structure and the second gate structure, away from the body contact region, the diode configured to provide a conduction path between the body contact region and the one of the first gate structure and the second gate structure.

### Claim 10 (depends on 1)

A radio frequency (RF) switch comprising the circuit of claim 1, wherein symmetry in structures provided by a layout of the first and second half FETs of the symmetric FET provides symmetry in RF voltages coupled to the structures in an OFF state of the RF switch.

### Claim 11 (depends on 10)

The radio frequency (RF) switch of claim 10, wherein the at least one symmetric FET comprises a plurality of symmetric FETs arranged according to a stack configuration.

### Claim 12 (depends on 11)

The radio frequency (RF) switch of claim 11, wherein the RF switch further comprises a biasing circuit comprising a resistive ladder with nodes that are coupled to gates nodes of the plurality of symmetric FETs.

### Claim 13 (depends on 12)

The radio frequency (RF) switch of claim 12, wherein resistors of the resistive ladder are arranged symmetrically with respect to a structural geometry of the plurality of symmetric FETs.

### Claim 14 (depends on 11)

The radio frequency (RF) switch of claim 11, wherein the plurality of symmetric FETs comprises a number of symmetric FETs that is equal to or larger than three.

### Claim 15 (depends on 11)

The radio frequency (RF) switch of claim 11, wherein the RF switch is monolithically integrated using a fabrication technology comprising one of: a) silicon-on-insulator (SOI) technology, and b) silicon-on-sapphire technology (SOS).

### Claim 16 (depends on 1)

An electronic module comprising the circuit of claim 1.

### Claim 17 (depends on 16)

A method, comprising:
using of the electronic module of claim 16 in one or more electronic systems comprising: a) a television, b) a cellular telephone, c) a personal computer, d) a workstation, e) a radio, f) a video player, g) an audio player, h) a vehicle, i) a medical device, and j) other electronic systems.

### Claim 18 (depends on 1)

The circuit of claim 1, wherein at least one of the at least two layers comprises source crossing structures and/or drain crossing structures.

### Claim 19 (depends on 1)

The symmetric field effect transistor (FET) of claim 1, wherein the symmetric FET is fabricated using one of: a) silicon-on-insulator (SOI) technology, and b) silicon-on-sapphire technology (SOS).

### Claim 20

A method for reducing OFF state parasitic capacitance of a field effect transistor (FET) operating as a radio frequency (RF) switch, the method comprising:
arranging a gate structure in a medial region of a planar layout of the FET;
arranging a source structure and a drain structure in respective opposite edges of the planar layout;
projecting gate fingers outwardly from the gate structure towards the opposite edges;
projecting interdigitated source and drain structures inwardly from respective source and drain structures towards respective opposite edges and along the gate fingers;
crossing pairs of the interdigitated source and drain structures in the medial region where the gate structure is arranged;
based on the crossing, reversing a sequence of the interdigitated source and drain structures along the gate fingers, thereby providing a symmetry in RF voltages coupled to structures of the FET in the OFF state; and
based on the symmetry in the RF voltages, reducing parasitic capacitance
wherein a total number of gate fingers that project outwardly towards one of the respective opposite edges is equal to a total number of gate fingers that project outwardly towards the other of the respective opposite edges.

### Claim 21 (depends on 20)

The method according to claim 20, further comprising:
arranging a body contact region in the medial region and centered with respect to the gate structure, the body contact region extending a full width of the FET.

### Claim 22

A symmetric field effect transistor (FET) comprising:
a gate structure arranged in a medial region of a planar layout of the symmetric FET;
a source structure and a drain structure arranged in respective opposite edges of the planar layout;
gate fingers that project outwardly from the gate structure towards the opposite edges; and
interdigitated source and drain structures that project inwardly from respective source and drain structures towards respective opposite edges and along the gate fingers; and
source and drain crossing structures arranged in the medial region where the gate structure is arranged, configured to provide crossings of pairs of the interdigitated source and drain structures so to reverse a sequence of the interdigitated source and drain structures along the gate fingers in a top half of the layout with respect to a bottom half of the layout
wherein a total number of gate fingers that project outwardly towards one of the respective opposite edges is equal to a total number of gate fingers that project outwardly towards the other of the respective opposite edges.

### Claim 23 (depends on 22)

The symmetric field effect transistor (FET) of claim 22, further comprising:
a body contact region arranged in the medial region and centered with respect to the gate structure, the body contact region extending a full width of the FET.