# US 12,113,015 B2 · Vertical transistor fuse latches

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 12,113,015 B2
- Document ID: US12113015B2
- Status: Granted
- Kind: B2
- Application number: 17/396,341
- Filed: 2021-08-06
- Published: 2023-02-09
- Granted: 2024-10-08
- Earliest claimed: 2021-08-06
- Assignees: Micron Technology, Inc.
- Applicants: Micron Technology, Inc.
- Inventors: Fatma Arzum Simsek-Ege; Yuan He
- Web page: https://patentgrep.com/patent/US12113015B2

## CPC

- G11C 5/025: {Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device (geometrical lay-out of the components in integrated circuits, geometrical lay-out of the components in integrated circuits H10D89/10)}
- H10W 20/493: {Fuses, i.e. interconnections changeable from conductive to non-conductive}
- G11C 17/16: using electrically-fusible links
- G11C 29/76: {using address translation or modifications}
- H10B 12/50: {Peripheral circuit region structures}
- G11C 11/4072: Circuits for initialization, powering up or down, clearing memory or presetting
- G11C 11/4074: Power supply or voltage generation circuits, e.g. bias voltage generators, substrate voltage generators, back-up power, power control circuits
- G11C 11/4096: Input/output [I/O] data management or control circuits, e.g. reading or writing circuits, I/O drivers or bit-line switches
- G11C 2029/4402: {Internal storage of test result, quality data, chip identification, repair information}
- G11C: STATIC STORES (semiconductor memory devices H10B)
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10B: ELECTRONIC MEMORY DEVICES

## Abstract

Methods, systems, and devices for vertical transistor fuse latches are described. An apparatus may include a substrate and a memory array that is coupled with the substrate. The apparatus may also include a latch that is configured to store information from a fuse for the memory array. The latch may be at least partially within an additional substrate separate from and above the substrate. The latch may include a quantity of p-type vertical transistors and a quantity of n-type vertical transistors each at least partially disposed within the additional substrate above the substrate.

## Claims

### Claim 1

An apparatus, comprising:
a substrate;
a memory array coupled with the substrate; and
a latch configured to store information from a fuse for the memory array, the latch disposed within an additional substrate above the substrate and comprising:
a plurality of p-type vertical transistors comprising a first plurality of gate terminals coupled together; and
a plurality of n-type vertical transistors comprising a second plurality of gate terminals coupled together.

### Claim 2 (depends on 1)

The apparatus of claim 1, wherein the plurality of p-type vertical transistors comprises:
a first p-type vertical transistor and a second p-type vertical transistor each coupled with a positive voltage supply, and wherein the plurality of n-type vertical transistors comprises:
a first n-type vertical transistor and a second n-type vertical transistor each coupled with a negative voltage supply.

### Claim 3 (depends on 2)

The apparatus of claim 2, further comprising:
a first conductive line that couples a gate terminal of the first p-type vertical transistor with a gate terminal of the first n-type vertical transistor; and
a second conductive line that couples a gate terminal of the second p-type vertical transistor with a gate terminal of the second n-type vertical transistor.

### Claim 4 (depends on 2)

The apparatus of claim 2, further comprising:
a first conductive line that couples a source terminal of the first n-type vertical transistor with a drain terminal of the first p-type vertical transistor; and
a second conductive line that couples a source terminal of the second n-type vertical transistor with a drain terminal of the second p-type vertical transistor.

### Claim 5 (depends on 2)

The apparatus of claim 2, further comprising:
a first conductive line that couples a source terminal of the first n-type vertical transistor and a drain terminal of the first p-type vertical transistor with a gate terminal of the second n-type vertical transistor and a gate terminal of the second p-type vertical transistor; and
a second conductive line that couples a source terminal of the second n-type vertical transistor and a drain terminal of the second p-type vertical transistor with a gate terminal of the first n-type vertical transistor and a gate terminal of the first p-type vertical transistor.

### Claim 6 (depends on 1)

The apparatus of claim 1, further comprising:
a set of transistors disposed on the substrate and configured to selectively couple the latch with the fuse.

### Claim 7 (depends on 1)

The apparatus of claim 1, wherein the memory array comprises memory cells that are positioned above a first region of the substrate, and wherein the latch is positioned above a second region of the substrate.

### Claim 8 (depends on 7)

The apparatus of claim 7, further comprising:
logic disposed on the second region of the substrate and configured for operating the memory array.

### Claim 9 (depends on 1)

The apparatus of claim 1, wherein the memory array comprises a dynamic random access memory (DRAM) array.

### Claim 10

An apparatus, comprising:
a substrate;
a memory array coupled with the substrate;
a latch configured to store information from a fuse for the memory array, the latch comprising a plurality of p-type vertical transistors and a plurality of n-type vertical transistors each at least partially disposed within an additional substrate above the substrate;
a first plurality of conductive lines, wherein each conductive line in the first plurality of conductive lines couples source terminals of a respective set of the plurality of p-type vertical transistors that are connected in parallel; and
a second plurality of conductive lines, wherein each conductive line in the second plurality of conductive lines couples drain terminals of a respective set of the plurality of n-type vertical transistors that are connective in parallel.

### Claim 11

An apparatus, comprising:
a memory array coupled with a substrate;
a fuse for the memory array; and
a latch at least partially within an additional substrate above the substrate and configured to store information from the fuse, the latch comprising:
a first p-type vertical transistor comprising a gate terminal and a drain terminal;
a first n-type vertical transistor comprising a gate terminal coupled with the gate terminal of the first p-type vertical transistor and comprising a source terminal coupled with the drain terminal of the first p-type vertical transistor;
a second p-type vertical transistor comprising a gate terminal and a drain terminal; and
a second n-type vertical transistor comprising:
a gate terminal coupled with the gate terminal of the second p-type vertical transistor, coupled with the drain terminal of the first p-type vertical transistor, and coupled with the source terminal of the first n-type vertical transistor; and
a source terminal coupled with the drain terminal of the second p-type vertical transistor.

### Claim 12 (depends on 11)

The apparatus of claim 11, further comprising:
a first conductive line that couples the source terminal of the first n-type vertical transistor and the drain terminal of the first p-type vertical transistor with the gate terminal of the second n-type vertical transistor and the gate terminal of the second p-type vertical transistor; and
a second conductive line that couples the source terminal of the second n-type vertical transistor and the drain terminal of the second p-type vertical transistor with the gate terminal of the first n-type vertical transistor and the gate terminal of the first p-type vertical transistor.

### Claim 13 (depends on 11)

The apparatus of claim 11, wherein the memory array is disposed at least partially within a first region of the substrate, and wherein the latch is above a second region of the substrate.

### Claim 14

An apparatus, comprising:
a memory array coupled with a substrate;
a fuse for the memory array;
a latch at least partially within an additional substrate above the substrate and configured to store information from the fuse, the latch comprising:
a first p-type vertical transistor comprising a gate terminal and a drain terminal;
a first n-type vertical transistor comprising a gate terminal coupled with the gate terminal of the first p-type vertical transistor and comprising a source terminal coupled with the drain terminal of the first p-type vertical transistor;
a second p-type vertical transistor comprising a gate terminal and a drain terminal;
a second n-type vertical transistor comprising a gate terminal coupled with the gate terminal of the second p-type vertical transistor and comprising a source terminal coupled with the drain terminal of the second p-type vertical transistor; and
a network of conductive lines that couples the first p-type vertical transistor, the first n-type vertical transistor, the second p-type vertical transistor, and the second n-type vertical transistor, wherein the network of conductive lines extends through the additional substrate in a three-dimensional manner; and
a set of transistors coupled with the substrate and configured to selectively couple the fuse with respective gate terminals of the first p-type vertical transistor and the first n-type vertical transistor.

### Claim 15

An apparatus, comprising:
a memory array coupled with a substrate;
a fuse for the memory array;
a latch at least partially within an additional substrate above the substrate and configured to store information from the fuse, the latch comprising:
a first p-type vertical transistor comprising a gate terminal and a drain terminal;
a first n-type vertical transistor comprising a gate terminal coupled with the gate terminal of the first p-type vertical transistor and comprising a source terminal coupled with the drain terminal of the first p-type vertical transistor;
a second p-type vertical transistor comprising a gate terminal and a drain terminal; and
a second n-type vertical transistor comprising a gate terminal coupled with the gate terminal of the second p-type vertical transistor and comprising a source terminal coupled with the drain terminal of the second p-type vertical transistor;
a first negative voltage supply coupled with a drain terminal of the first n-type vertical transistor and second negative voltage supply coupled with a drain terminal of the second n-type vertical transistor; and
a first positive voltage supply coupled with a source terminal of the first p-type vertical transistor and second positive voltage supply coupled with a source terminal of the second p-type vertical transistor.

### Claim 16

An apparatus, comprising:
a first substrate;
a memory array coupled with and disposed at least partially above the first substrate;
a first p-type vertical transistor of a latch that is configured to store information from a fuse for the memory array, the first p-type vertical transistor at least partially within a second substrate that is above the first substrate;
a first n-type vertical transistor of the latch, the first n-type vertical transistor at least partially within the second substrate that is above the first substrate; and
a second n-type vertical transistor comprising a gate terminal coupled with a drain terminal of the first p-type vertical transistor and coupled with a source terminal of the first n-type vertical transistor.

### Claim 17 (depends on 16)

The apparatus of claim 16, further comprising:
a first conductive line that couples a gate terminal of the first p-type vertical transistor with a gate terminal of the first n-type vertical transistor; and
a second conductive line that couples a drain terminal of the first p-type vertical transistor with a source terminal of the first n-type vertical transistor.

### Claim 18 (depends on 17)

The apparatus of claim 17, further comprising:
a second p-type vertical transistor of the latch, the second p-type vertical transistor at least partially within the second substrate that is above the first substrate; and
a second n-type vertical transistor of the latch, the second n-type vertical transistor at least partially within the second substrate that is above the first substrate.

### Claim 19 (depends on 18)

The apparatus of claim 18, further comprising:
a third conductive line that couples a gate terminal of the second p-type vertical transistor with a gate terminal of the second n-type vertical transistor; and
a fourth conductive line that couples a drain terminal of the second p-type vertical transistor with a source terminal of the second n-type vertical transistor.
