Substrate transfer apparatus

A substrate transfer apparatus comprising:

• a body portion having a surface including a holding region having a size corresponding to a substrate to be transferred and allowing the substrate to be fixed thereto, wherein the holding region includes a first region disposed in a center of the surface and a second region disposed on a circumference of the first region and disposed to be in contact with each side of the holding region;
• vacuum holes distributed in the holding region and providing suction force with respect to the substrate;
• and
• air holes distributed in the holding region, spaced apart from the vacuum holes, and providing a buoyancy force acting in a direction opposite to the suction force by jetting a gas.

A substrate transfer apparatus comprising:

• a body portion having a surface including a holding region corresponding in shape to a substrate to be transferred, wherein the body portion is movable relative to the substrate such that the holding region approaches the substrate by at least a first distance;
• vacuum holes distributed in the holding region and forming negative pressure to provide suction force to the substrate disposed at the first distance, wherein at least some of the vacuum holes are disposed at equal intervals at an edge of the holding region and have a same width;
• and
• air holes distributed in the holding region and forming positive pressure to provide a buoyancy force, with respect to the suction force, to the substrate close to the holding region at a second distance smaller than the first distance.