# US 12,112,958 B2 · Wafer processing system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,112,958 B2 - Document ID: US12112958B2 - Status: Granted - Kind: B2 - Application number: 18/520,647 - Filed: 2023-11-28 - Published: 2024-08-29 - Granted: 2024-10-08 - Earliest claimed: 2023-02-24 - Assignees: Highlight Tech Corp. - Applicants: Highlight Tech Corp. - Inventors: Chwung-Shan Kou; Chien-Cheng Chang; Chia-Ou Chang - Web page: https://patentgrep.com/patent/US12112958B2 ## CPC - H10P 72/0406: {for cleaning followed by drying, rinsing, stripping, blasting or the like} - H10P 72/00: Handling or holding of wafers, substrates or devices during manufacture or treatment thereof - H10P 72/0408: {for drying} - H10P 72/0414: {using mainly spraying means, e.g. nozzles} - H10P 72/10: using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] - H10P 72/7626: {characterised by the construction of the shaft} - H10P 52/00: Grinding, lapping or polishing of wafers, substrates or parts of devices - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Disclosed is a wafer processing system comprising a processing tank, a cleaning device and a drying device. The processing tank has a cantilever rotating device and a dynamic balance correction device. The cantilever rotating device has a holding part for holding a wafer of a variety of specification parameters and causing the wafer to rotate along a rotating shaft of the cantilever rotating device. The dynamic balance correction device performs a corresponding dynamic balance correction on the cantilever rotating device, so that the cantilever rotating device is in a dynamic balance state during rotation. A dynamic nozzle unit of the cleaning device ejects a cleaning fluid to clean the rotating wafer. The drying device is used to dry the rotating wafer. ## Claims ### Claim 1 A wafer processing system at least comprising: at least one processing tank having a cantilever rotating device and a dynamic balance correction device, the cantilever rotating device having a holding part for holding a wafer of a variety of specification parameters and causing the wafer to rotate along a rotating shaft of the cantilever rotating device, wherein the dynamic balance correction device performs a corresponding dynamic balance correction on the cantilever rotating device, so that the cantilever rotating device is in a dynamic balance state during rotation; a cleaning device having at least one dynamic nozzle unit, the dynamic nozzle unit correspondingly adjusting at least one operating parameter according to the specification parameters of the wafer, and ejecting a cleaning fluid to the wafer to perform a cleaning procedure when the cantilever rotating device rotates; and a drying device used to perform a drying procedure on the wafer processed by the cleaning procedure when the cantilever rotating device rotates. ### Claim 2 (depends on 1) The wafer processing system as claimed in claim 1, wherein the rotating shaft of the cantilever rotating device rotates obliquely at an angle that is not parallel to a horizontal plane. ### Claim 3 (depends on 1) The wafer processing system as claimed in claim 1, wherein the processing tank is disposed on a platform through at least one anti-vibration foot so that at least one vibration value of the processing tank is smaller than a preset value. ### Claim 4 (depends on 1) The wafer processing system as claimed in claim 1, wherein in the dynamic balance state, when the cantilever rotating device rotates, an axis line of the rotating shaft coincides with a center line of mass of the cantilever rotating device holding the wafer. ### Claim 5 (depends on 1) The wafer processing system as claimed in claim 1, wherein the processing tank has a shield surrounding the cantilever rotating device. ### Claim 6 (depends on 5) The wafer processing system as claimed in claim 5, wherein an inner side of the shield has an interceptor plate, an interceptor opening of the interceptor plate faces a tangential direction of the wafer during rotation to intercept the cleaning fluid that has completed the cleaning procedure for the rotating wafer. ### Claim 7 (depends on 1) The wafer processing system as claimed in claim 1, wherein the dynamic balance correction device is disposed on the holding part and/or the rotating shaft of the cantilever rotating device for utilizing an over-distance force effect to perform the corresponding dynamic balance correction on the cantilever rotating device so that the dynamic balance state can be maintained when the cantilever rotating device rotates. ### Claim 8 (depends on 7) The wafer processing system as claimed in claim 7, wherein the dynamic balance correction device is an active magnetic bearing for performing the corresponding dynamic balance correction on the cantilever rotating device. ### Claim 9 (depends on 7) The wafer processing system as claimed in claim 7, wherein the dynamic balance correction device comprises at least one first magnetic element and at least one second magnetic element, the first magnetic element is circularly disposed on the cantilever rotating device, the second magnetic element surrounds the cantilever rotating device in a non-contact manner, thereby utilizing the over-distance force effect between the first magnetic element and the second magnetic element to perform the corresponding dynamic balance correction on the cantilever rotating device. ### Claim 10 (depends on 1) The wafer processing system as claimed in claim 1, wherein the dynamic balance correction device is a center-of-mass adjustment structure provided on the cantilever rotating device for correcting a degree of overlap between a center line of mass of the cantilever rotating device holding the wafer and an axis line of the rotating shaft. ### Claim 11 (depends on 10) The wafer processing system as claimed in claim 10, wherein center-of-mass adjustment structure performs the corresponding dynamic balance correction on the cantilever rotating device by pivoting, retracting or moving. ### Claim 12 (depends on 1) The wafer processing system as claimed in claim 1, wherein the dynamic balance correction device is at least one wafer holder of the holding part of the cantilever rotating device, and the wafer holder has non-equivalent cross-sectional areas along a direction of an axis line of the rotating shaft. ### Claim 13 (depends on 1) The wafer processing system as claimed in claim 1, wherein the cleaning fluid is cleaning liquid and/or hot steam. ### Claim 14 (depends on 13) The wafer processing system as claimed in claim 13, further comprising a microwave generating unit, the microwave generating unit generating a microwave to heat part or all of the cleaning liquid into the hot steam. ### Claim 15 (depends on 1) The wafer processing system as claimed in claim 1, further comprising at least one auxiliary gas supply source for supplying at least one auxiliary gas to the processing tank. ### Claim 16 (depends on 15) The wafer processing system as claimed in claim 15, wherein the cleaning fluid comprises aqueous solution and/or hot steam, and the auxiliary gas is ozone, so that the cleaning fluid reacts with the auxiliary gas to form an ozone aqueous solution to clean the wafer. ### Claim 17 (depends on 15) The wafer processing system as claimed in claim 15, wherein the auxiliary gas is hot nitrogen to assist in drying the wafer. ### Claim 18 (depends on 15) The wafer processing system as claimed in claim 15, wherein the drying device comprises a thermal energy supply unit and/or an air extraction unit, the thermal energy supply unit supplies a thermal energy to the processing tank during the drying procedure, and the air extraction unit makes the processing tank lower than an atmospheric pressure during the drying procedure, thereby accelerating drying of the wafer. ### Claim 19 (depends on 1) The wafer processing system as claimed in claim 1, wherein the specification parameters of the wafer are selected from a group consisting of quantity, weight, position and size, and the operating parameter of the dynamic nozzle unit is selected from a group consisting of an ejection direction of the dynamic nozzle unit, a quantity of the dynamic nozzle unit, a flow rate of the cleaning fluid, a reciprocating speed of the dynamic nozzle unit and a cleaning time. ### Claim 20 (depends on 1) The wafer processing system as claimed in claim 1, wherein a quantity of the dynamic nozzle unit is more than one, and the dynamic nozzle units operate cooperatively with each other to jointly clean the wafer. ### Claim 21 (depends on 1) The wafer processing system as claimed in claim 1, wherein the dynamic nozzle unit ejects the cleaning fluid on the wafer in a scanning manner to clean the wafer. ### Claim 22 (depends on 1) The wafer processing system as claimed in claim 1, wherein one side of the cantilever rotating device is a supporting end, another side of the cantilever rotating device is a free end, and the wafer is detachably placed on the holding part of the cantilever rotating device through the free end. ### Claim 23 (depends on 1) The wafer processing system as claimed in claim 1, wherein the dynamic balance correction device performs the corresponding dynamic balance correction on the cantilever rotating device based on the specification parameters of the wafer, the operating parameter of the dynamic nozzle unit, a rotation speed of the rotating shaft and/or a vibration state.