# US 12,112,923 B2 · Reaction chamber lining

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- Number: US 12,112,923 B2
- Document ID: US12112923B2
- Status: Granted
- Kind: B2
- Application number: 17/292,796
- Filed: 2019-09-18
- Published: 2021-12-23
- Granted: 2024-10-08
- Earliest claimed: 2018-11-12
- Assignees: Jiangsu Leuven Instruments Co. Ltd
- Applicants: Jiangsu Leuven Instruments Co. Ltd
- Inventors: Na Li; Shiran Cheng; Haiyang Liu; Zhaochao Chen; Yonggang Hou; Chengyi Wang; Dongdong Hu; Kaidong Xu
- Web page: https://patentgrep.com/patent/US12112923B2

## CPC

- H01J 37/32495: {Means for protecting the vessel against plasma}
- H01J 37/32: Gas-filled discharge tubes (heating by discharge H05B)
- H01J 2237/334: Etching
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A reaction chamber lining including an annular side wall and a flange arranged on an upper portion of the side wall. An end face of the flange extends from the side wall in a radial direction, an outer edge of the flange extends in the radial direction to form fixing flanging parts, and a hole is in each of the fixing flanging parts. The side wall includes a rectangular slot, and a position of the rectangular slot corresponds to a position of a robotic arm access hole in a side wall of a reaction chamber. The side wall includes through holes and honeycomb-shaped apertures. A face joined to the bottom of the side wall includes a disc extending inwards in the radial direction, an extending end of the disc is fitted with an outer edge of an electrode assembly. A plurality of circles of slotted holes are in the disc.

## Claims

### Claim 1

A reaction chamber lining, comprising:
an annular side wall main body and a flange arranged on an upper portion of the annular side wall main body, wherein an end face of the flange extends out of the side wall in a radial direction, an outer edge of the flange extends in the radial direction to form fixing flanging parts, and a hole is provided in each of the fixing flanging parts;
the side wall is provided with a rectangular slot for alignment with a robotic arm access hole of a reaction chamber; the side wall is provided with through holes and honeycomb-shaped apertures;
and a face joined to a bottom of the side wall is provided with a disc extending inwards in the radial direction, an extending end of the disc is for fitting with an outer edge of an electrode assembly arranged at the center of a reaction chamber, and a plurality of circles of slotted holes are annularly provided in the disc,
a width of the slotted holes ranges from 3 mm to 5 mm, each circle is provided with a plurality of slotted holes, and a length of each of the slotted holes is a length of an arc with an angle between 20° and 40°,
a gap between two adjacent circles of slotted holes ranges from 1 mm to 2.5 mm, and the two adjacent circles of slotted holes are distributed in a staggered manner, and
an angle from an initial position of a first circle of slotted holes to an initial position of an adjacent inner circle of slotted holes ranges from 0° to 40°.

### Claim 2 (depends on 1)

The reaction chamber lining according to claim 1, wherein
the end face of the flange is circular or square.

### Claim 3 (depends on 1)

The reaction chamber lining according to claim 1, wherein
the end face of the flange extends out of the side wall in the radial direction for a length of 6 mm to 35 mm and a thickness of 5 mm to 10 mm.

### Claim 4 (depends on 1)

The reaction chamber lining according to claim 1, wherein the end face of the flange is provided with a sealing groove and a conductive coil accommodating groove to implement contact and sealing between the reaction chamber lining and a chamber cover assembly at an upper portion of a reaction chamber.

### Claim 5 (depends on 1)

The reaction chamber lining according to claim 1, wherein
an aperture diameter of the honeycomb-shaped apertures ranges from 1.5 mm to 3 mm.

### Claim 6 (depends on 1)

The reaction chamber lining according to claim 1, wherein
a thickness of the disc ranges from 3 mm to 7 mm.

### Claim 7 (depends on 1)

The reaction chamber lining according to claim 1, wherein
a material of the reaction chamber lining is aluminum, ceramic or quartz.