Dual source injector with switchable analyzing magnet

An ion implantation system comprising:

• a mass analyzing magnet comprising a yoke and a coil defining a first entrance, a second entrance, and an exit of the mass analyzing magnet, and wherein one or more of the yoke and the coil define an interior region and an exterior region of the mass analyzing magnet;
• a first ion source configured to define a first ion beam directed toward the first entrance of the mass analyzing magnet along a first beam path;
• a second ion source configured to define a second ion beam directed toward the second entrance of the mass analyzing magnet along a second beam path;
• and
• a magnet current source configured to supply a magnet current to the mass analyzing magnet, wherein the mass analyzing magnet is configured to mass analyze the first ion beam and second ion beam, respectively, thereby defining a mass analyzed ion beam at the exit of the mass analyzing magnet along a mass analyzed beam path;
• and
• one or more shields positioned in one or more of the interior region and exterior region of the mass analyzing magnet and configured to prevent a line-of-sight between the first ion source and the second ion source.

An ion implantation system comprising:

• a mass analyzing magnet having a first entrance, a second entrance, and an exit defined therein;
• a first ion source configured to define a first ion beam directed toward the first entrance of the mass analyzing magnet along a first beam path;
• a second ion source configured to define a second ion beam directed toward the second entrance of the mass analyzing magnet along a second beam path;
• and
• a magnet current source configured to supply a magnet current to the mass analyzing magnet, wherein the mass analyzing magnet is configured to mass analyze the first ion beam and second ion beam, respectively, thereby defining a mass analyzed ion beam at the exit of the mass analyzing magnet along a mass analyzed beam path;
• and
• one or more shields configured to prevent a line-of-sight between the first ion source and the second ion source.