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US 12,112,896 B2Granted
Film production method and electrode foil production method for producing layer containing metal oxide
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsNaomi Kurihara, Akihiro Yamaguchi, Mitsuhisa Yoshimura, Miwa Ogawa
Life of this patent
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Abstract
A film production method for producing a layer containing a metal oxide, the film production method including: a heating step of heating a metal foil containing a first metal by bringing a part of the metal foil into contact with at least one heat generator; a first contact step of letting first gas containing a second metal to be in contact with both surfaces of the metal foil in a state where the part of the metal foil is supported; and a second contact step of letting second gas containing an oxidant to be in contact with the both surfaces of the metal foil in a state where the part of the metal foil is supported.
Claims39
A film production method for producing a layer containing a metal oxide, the film production method comprising:
- a heating step of heating a metal foil containing a first metal by bringing a part of the metal foil into contact with at least one heat generator, the metal foil having a first main surface and a second main surface that is disposed opposite to the first main surface;
- a first contact step of letting first gas containing a second metal to be in contact with each of the first main surface and the second main surface of the metal foil in a state where the part of the metal foil is supported by the at least one heat generator;
- and
- a second contact step of letting second gas containing an oxidant to be in contact with each of the first main surface and the second main surface of the metal foil in a state where the part of the metal foil is supported by the at least one heat generator so that an oxide of the second metal is formed on each of the first main surface and the second main surface, wherein:
- the at least one heat generator includes a first heat generator and a second heat generator, the first heat generator being in contact with the first main surface of the metal foil, the second heat generator being in contact with the second main surface of the metal foil, and
- the part of the metal foil is supported by being sandwiched between the first heat generator and the second heat generator.
3 more elements
A method for producing an electrode foil, the method comprising:
- a preparation step of preparing a metal foil containing a first metal, the metal foil having a first main surface and a second main surface that is disposed opposite to the first main surface;
- a surface roughening step of roughening each of the first main surface and the second main surface of the metal foil;
- a heating step of heating the metal foil that has been roughened by bringing a part of the metal foil into contact with at least one heat generator;
- a first contact step of letting first gas containing a second metal to be in contact with each of the first main surface and the second main surface of the metal foil in a state where the part of the metal foil is supported by the at least one heat generator;
- and
- a second contact step of forming a dielectric layer by letting second gas containing an oxidant to be in contact with each of the first main surface and the second main surface of the metal foil in a state where the part of the metal foil is supported by the at least one heat generator so that an oxide of the second metal is formed on each of the first main surface and the second main surface, wherein:
- the at least one heat generator includes a first heat generator and a second heat generator, the first heat generator being in contact with the first main surface of the metal foil, the second heat generator being in contact with the second main surface of the metal foil, and
- the part of the metal foil is supported by being sandwiched between the first heat generator and the second heat generator.
5 more elements
A film production method for producing a layer containing a metal oxide, comprising:
- a preparation step of preparing a metal foil containing a first metal, the metal foil having a first main surface and a second main surface that is disposed opposite to the first main surface;
- a first contact step of letting first gas containing a second metal to be in contact with each of the first main surface and the second main surface of the metal foil;
- and
- a second contact step of letting second gas containing an oxidant to be in contact with each of the first main surface and the second main surface of the metal foil so that an oxide of the second metal is formed on each of the first main surface and the second main surface,
- wherein the first contact step includes a first application step of applying a voltage to the metal foil in the presence of the first gas by bringing a part of the metal foil into contact with at least one first power feeder.
2 more elements
A method for producing an electrode foil, the method comprising:
- a preparation step of preparing a metal foil containing a first metal, the metal foil having a first main surface and a second main surface that is disposed opposite to the first main surface;
- a surface roughening step of roughening each of the first main surface and the second main surface of the metal foil;
- a first contact step of letting first gas containing a second metal to be in contact with the each of the first main surface and the second main surface of the metal foil that has been roughened;
- a second contact step of letting second gas containing an oxidant to be in contact with the each of the first main surface and the second main surface of the metal foil so that an oxide of the second metal is formed on each of the first main surface and the second main surface of the metal foil,
- wherein the first contact step includes a first application step of applying a voltage to the metal foil in the presence of the first gas by bringing a part of the metal foil into contact with at least one first power feeder.
2 more elements
A film production method for producing a layer containing a metal oxide, comprising:
- a preparation step of preparing a metal foil containing a first metal, the metal foil having a first main surface and a second main surface that is disposed opposite to the first main surface;
- a first contact step of letting first gas containing a second metal to be in contact with each of the first main surface and the second main surface of the metal foil;
- a second contact step of letting second gas containing an oxidant to be in contact with each of the first main surface and the second main surface of the metal foil so that an oxide of the second metal is formed on each of the first main surface and the second main surface,
- wherein the second contact step includes an application step of applying a voltage to the metal foil in the presence of the second gas by bringing a part of the metal foil into contact with at least one power feeder.
1 more element
A method for producing an electrode foil, the method comprising:
- a preparation step of preparing a metal foil containing a first metal, the metal foil having a first main surface and a second main surface that is disposed opposite to the first main surface;
- a roughening step of roughening each of the first main surface and the second main surface of the metal foil;
- a first contact step of letting first gas containing a second metal to be in contact with each of the first main surface and the second main surface of the metal foil that has been roughened;
- a second contact step of letting second gas containing an oxidant to be in contact with each of the first main surface and the second main surface of the metal foil so that an oxide of the second metal is formed on each of the first main surface and the second main surface,
- wherein the second contact step includes an application step of applying a voltage to the metal foil in the presence of the second gas by bringing a part of the metal foil into contact with at least one power feeder.
2 more elements
A film production method for producing a layer containing a metal oxide, comprising:
- a preparation step of preparing a metal foil containing a first metal, the metal foil having a first main surface and a second main surface that is disposed opposite to the first main surface;
- a heating step of heating the metal foil by bringing a part of the metal foil into contact with at least one heat generator;
- a first contact step of letting first gas containing a second metal to be in contact with each of the first main surface and the second main surface of the metal foil in a state where the part of the metal foil is supported by the at least one heat generator;
- a second contact step of letting second gas containing an oxidant to be in contact with each of the first main surface and the second main surface of the metal foil in a state where the part of the metal foil is supported by the at least one heat generator so that an oxide of the second metal is formed on each of the first main surface and the second main surface,
- wherein:
- the first contact step includes a first application step of applying a voltage to the metal foil in the presence of the first gas by bringing a part of the metal foil into contact with at least one first power feeder, and
- the second contact step includes a second application step of applying a voltage to the metal foil in the presence of the second gas by bringing a part of the metal foil into contact with at least one second power feeder.
4 more elements
Dependencies are inferred from the claim text.