# US 12,111,581 B2 · Method to manufacture nano ridges in hard ceramic coatings

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- Number: US 12,111,581 B2
- Document ID: US12111581B2
- Status: Granted
- Kind: B2
- Application number: 17/291,086
- Filed: 2019-10-22
- Published: 2021-12-30
- Granted: 2024-10-08
- Earliest claimed: 2018-11-05
- Assignees: ASML Holding N.V.
- Applicants: ASML Holding N.V.
- Inventors: Mehmet Ali Akbas; Tammo Uitterdijk; Christopher John Mason; Matthew Lipson; David Hart Peterson; Michael Perry; Peter Helmus; Jerry Jianguo Deng; Damoon Sohrabibabaheidary
- Web page: https://patentgrep.com/patent/US12111581B2

## CPC

- G03F 7/707: {Chucks, e.g. chucking or un-chucking operations or structural details}
- G03F 7/70491: {Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes}
- H10P 72/7614: {characterised by a plurality of individual support members, e.g. support posts or protrusions}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A method for reducing sticking of an object to a surface used in a lithography process includes receiving, at a control computer, instructions for a tool configured to modify the surface and forming, in a deterministic manner based on the instructions received at the control computer, a modified surface having a furrow and a ridge, wherein the ridge reduces the sticking by reducing a contact surface area of the modified surface. Another apparatus includes a modified surface that includes furrows and ridges forming a reduced contact surface area to reduce a sticking of an object to the modified surface, the ridges having an elastic property that causes the reduced contact surface area to increase when the plurality of ridges is elastically deformed.

## Claims

### Claim 1

A method for reducing sticking of a wafer to a wafer support used in a lithography process, wherein the wafer support comprises a plurality of burls and each of the plurality of burls has a surface configured to support a back surface of the wafer, the method comprising:
receiving, at a control computer, instructions for a tool configured to modify the surfaces of the plurality of burls; and
forming, in a deterministic manner based on the instructions received at the control computer, the modified surfaces of the plurality of burls with a furrow and a ridge,
wherein the ridge reduces the sticking by reducing a contact surface area of the modified surfaces of the plurality of burls.

### Claim 2 (depends on 1)

The method of claim 1, wherein the modified surfaces of the plurality of burls results from moving a tool tip of a tool causing a plastic deformation of the surfaces of the plurality of burls such that there is substantially no loss of material.

### Claim 3 (depends on 1)

The method of claim 1, further comprising:
acquiring images of the surfaces of the plurality of burls from an imaging device;
registering a tool tip in a coordinate space of the surfaces of the plurality of burls based on the images; and
controlling the tool to move the tool tip to predefined coordinates in the coordinate space to create the furrow and the ridge.

### Claim 4 (depends on 3)

The method of claim 3, wherein the controlling has a horizontal resolution of 1 micron or less and a vertical resolution of 10 nanometers or less, and wherein the resolution of the delivered force by the tool tip is 1 milli-Newton or less.

### Claim 5 (depends on 3)

The method of claim 3, the controlling further comprising controlling the tool tip to form the modified surfaces of the plurality of burls having a plurality of parallel ridges.

### Claim 6 (depends on 3)

The method of claim 3, the controlling further comprising controlling the tool tip to form the modified surfaces of the plurality of burls having a non-uniform density of ridges that corresponds to a non-uniform burl load.

### Claim 7 (depends on 1)

The method of claim 1, wherein the forming the modified surfaces of the plurality of burls is performed when the surfaces of the plurality of burls are at between 15 and 40 degrees Celsius.

### Claim 8 (depends on 1)

A computer program product comprising a non-transitory computer readable medium having instructions recorded thereon, the instructions when executed by a computer implementing the method of claim 1.

### Claim 9

A wafer support for use in a lithography process, the wafer support comprising:
a plurality of burls, wherein each of the plurality of burls has a burl surface configure to support a back surface of a wafer; and
wherein the surfaces of the burls are modified to have a plurality of furrows and ridges forming a reduced contact surface area to reduce a sticking of the wafer to the modified surfaces of the burls, wherein at least 60% of the plurality of ridges have a height variation of less than 100 nm.

### Claim 10 (depends on 9)

The wafer support of claim 9, wherein the plurality of ridges have a ridge height that is measured from an average height of an unmodified surface.

### Claim 11 (depends on 9)

The wafer support of claim 9, wherein at least 80% of the plurality of ridges have a height variation of less than 100 nm.

### Claim 12 (depends on 11)

The wafer support of claim 11, wherein at least 60% of the plurality of ridges have a height variation of less than 10 nm.

### Claim 13 (depends on 9)

The wafer support of claim 9, wherein at least 80% of the plurality of ridges have a height variation of less than 5 nm.

### Claim 14 (depends on 9)

The wafer support of claim 9, wherein the height variation is measured over essentially all of the modified surface.

### Claim 15 (depends on 9)

The wafer support of claim 9, at least some of the plurality of burls having a coating, wherein the plurality of furrows and ridges are formed in the coating.

### Claim 16 (depends on 9)

The wafer support of claim 9, wherein the plurality of furrows and ridges are parallel.

### Claim 17 (depends on 9)

The wafer support of claim 9, further comprising a plurality of hilltops, wherein the plurality of furrows and ridges are formed across the hilltops.

### Claim 18 (depends on 17)

The wafer support of claim 17, wherein the plurality of furrows and ridges are formed substantially perpendicular to the hilltops.