# US 12,111,571 B2 · Method of, and apparatus for, simultaneous dual-sided imprinting > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,111,571 B2 - Document ID: US12111571B2 - Status: Granted - Kind: B2 - Application number: 17/323,225 - Filed: 2021-05-18 - Published: 2021-11-25 - Granted: 2024-10-08 - Earliest claimed: 2020-05-22 - Assignees: Stensborg A/S - Applicants: Stensborg A/S - Inventors: Leif Yde; Jan Fagerbo Stensborg - Web page: https://patentgrep.com/patent/US12111571B2 ## CPC - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract In an embodiment there is provided a method for simultaneous dual-sided direct imprinting of surface relief structures on a substrate, the method utilising an imprinting arrangement comprising first and second rotatable cylinders, each rotatable cylinder being arranged to carry at least one mould having a surface relief structure, at least one rotatable cylinder comprising a resilient layer located between a cylindrical outer surface of the respective rotatable cylinder and the respective mould, and the rotatable cylinders being movable with respect to one another and arranged to form an imprinting nip therebetween, the imprinting nip having an imprinting contact area, wherein the method comprises the steps of: a) providing to the imprinting nip a substrate comprising first and second sides each having a curable medium thereon; b) directly imprinting surface relief structures into the curable medium on both the first and second sides of the substrate by passing the substrate through the imprinting nip and engaging, in the imprinting contact area, a first mould on the first rotatable cylinder with the curable medium on the first side of the substrate and a second mould on the second rotatable cylinder with the curable medium on the second side of the substrate; and c) illuminating at least a part of the curable media on the first and second sides of the substrate with curing radiation to at least partially cure the curable media on the substrate. ## Claims ### Claim 1 A method for simultaneous dual-sided direct nanoimprint lithography of surface relief structures on a substrate, the method utilising a nanoimprint lithography arrangement comprising first and second rotatable cylinders, each rotatable cylinder being arranged to carry at least one mould having a surface relief structure, each rotatable cylinder comprising a resilient layer located between a cylindrical outer surface of the respective rotatable cylinder and the respective mould, and the rotatable cylinders being movable with respect to one another and arranged to form an imprinting nip therebetween, the imprinting nip having an imprinting contact area, wherein the method comprises the steps of: a) providing to the imprinting nip a substrate comprising first and second sides each having a curable medium thereon; b) directly nanoimprinting surface relief structures into the curable medium on both the first and second sides of the substrate by passing the substrate through the imprinting nip and engaging, in the imprinting contact area, a first mould on the first rotatable cylinder with the curable medium on the first side of the substrate and a second mould on the second rotatable cylinder with the curable medium on the second side of the substrate; and c) illuminating, in the imprinting nip, at least a part of the curable media on the first and second sides of the substrate with curing radiation to at least partially cure the curable media on the substrate as the substrate passes through the imprinting nip; wherein step c) further comprises illuminating the substrate with at least one illumination arrangement having an illumination region located within the imprinting contact area; and wherein step c) further comprises varying the position of the illumination region within the imprinting contact area by rotating the illumination arrangement or translating the illumination arrangement in a direction parallel to the direction of movement of the substrate passing through the imprinting nip. ### Claim 2 (depends on 1) A method according to claim 1, wherein, prior to step a), the method further comprises the step of: d) applying curable medium to the first and/or second sides of the substrate. ### Claim 3 (depends on 2) A method according to claim 2, wherein step d) further comprises applying the curable medium by one or more of: flexographic printing; offset printing; inkjet printing; spin coating; or slot die coating. ### Claim 4 (depends on 2) A method according to claim 2, wherein the curable medium is applied directly to the first and/or second sides of the substrate. ### Claim 5 (depends on 2) A method according to claim 2, wherein step d) further comprises the step of: e) applying curable medium to at least one mould carried by the first rotatable cylinder and/or applying curable medium to at least one mould carried by the second rotatable cylinder prior to imprinting in the imprinting nip. ### Claim 6 (depends on 1) A method according to claim 1, wherein the substrate comprises a continuous web and step a) comprises conveying the web to the imprinting nip; or wherein the substrate comprises a sheet, a wafer or a device and step a) comprises transporting the sheet, wafer or device to the imprinting nip. ### Claim 7 (depends on 1) A method according to claim 1, wherein the resilient layer comprises a material having a hardness in the range from 25 to 90 shore A and/or the resilient layer has a thickness between 1 and 5 mm and/or the resilient layer is formed from a polymeric, elastomeric or rubber material. ### Claim 8 (depends on 1) A method according to claim 1, wherein step c) further comprises illuminating the substrate with at least one illumination arrangement, wherein an illumination arrangement is located within the interior of one or both of the first and second rotatable cylinders and the at least one illumination arrangement is operable to illuminate at least a portion of the substrate to at least partially cure the curable medium on at least one side of the substrate. ### Claim 9 (depends on 1) A method according to claim 1, wherein step b) further comprises: g) rotatably driving at least one rotatable cylinder. ### Claim 10 (depends on 1) A method according to claim 1, wherein the two cylinders are arranged to rotate with synchronised surface speed. ### Claim 11 (depends on 1) A method according to claim 1, wherein the illumination region is entirely within the imprinting contact area. ### Claim 12 (depends on 11) A method according to claim 11, wherein the illumination region is smaller than the imprinting contact area. ### Claim 13 (depends on 1) A method according to claim 1, wherein the illumination region comprises a beam line having a beam width narrower than the width of the imprinting contact area defined by the imprinting nip. ### Claim 14 (depends on 13) A method according to claim 13, wherein the beam width is in the range of 0.5 to 10 mm. ### Claim 15 (depends on 1) A method according to claim 1, wherein at least one of first and second rotatable cylinders is transparent or translucent. ### Claim 16 (depends on 1) A method according to claim 1, wherein the curing radiation is focused onto a portion of the curable medium on the substrate in the imprinting contact area. ### Claim 17 (depends on 16) A method according to claim 16, wherein the curing radiation is focused onto the portion of the curable medium on the substrate in the imprinting contact area while the substrate passes through the imprinting nip. ### Claim 18 (depends on 1) A method according to claim 1, wherein the nanoimprint lithography arrangement comprises an illumination source inside at least one of the first and second rotatable cylinders; wherein the curing radiation is emitted from the illumination source through the at least one of the first and second rotatable cylinders to the curable medium on the substrate.