# US 12,111,570 B2 · Shaping system with cutouts in an optical diaphragm and method of use > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,111,570 B2 - Document ID: US12111570B2 - Status: Granted - Kind: B2 - Application number: 17/215,630 - Filed: 2021-03-29 - Published: 2022-09-29 - Granted: 2024-10-08 - Earliest claimed: 2021-03-29 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Teresa Perez Estrada - Web page: https://patentgrep.com/patent/US12111570B2 ## CPC - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - B29C 35/0805: {using electromagnetic radiation} - B29C 59/022: {characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor} - B29C 2035/0827: {using UV radiation} - B82Y 40/00: Manufacture or treatment of nanostructures - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00) - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract A shaping system and method of using the shaping system. The shaping system may comprise a radiation source; a template chuck configured to hold a template; and an optical diaphragm positioned between the template chuck and the radiation source. The optical diaphragm may have a plurality of blades. Each blade has a cutout in an edge of each blade. Edges and cutouts of the plurality of blades may form an opening which actinic radiation from the radiation source passes through. ## Claims ### Claim 1 A shaping system comprising: a radiation source; a template chuck configured to hold a template; an optical diaphragm positioned between the template chuck and the radiation source; and the optical diaphragm has a plurality of blades, each blade having a cutout in an edge of the each blade, wherein each blade has two cutouts with a cutout width that are separated from each other by a cutout separation distance; wherein a cutout fraction is a cutout width divided by cutout separation distance; and wherein the cutout fraction is between 0.1-0.2, wherein edges and cutouts of the plurality of blades form an opening which actinic radiation from the radiation source passes through. ### Claim 2 (depends on 1) The shaping system of claim 1, wherein the cutouts are arranged to increase intensity, at an image plane, of actinic radiation from the radiation source at corners of a mesa of the template, relative to blades without cutouts. ### Claim 3 (depends on 1) The shaping system of claim 1, wherein the cutouts are arranged to reduce a variation in actinic radiation received at corners of a mesa of the template relative to the actinic radiation received at centers of mesa edges to be below a variation threshold. ### Claim 4 (depends on 1) The shaping system of claim 1, wherein the cutouts curve outwards towards intersections of the blades. ### Claim 5 (depends on 1) The shaping system of claim 1, the plurality of blades are movable to a first position at which a first particular cutout in a first particular blade intersects with a second particular cutout in a second particular blade. ### Claim 6 (depends on 1) The shaping system of claim 1, wherein one or more of the cutouts have a rectilinear shape. ### Claim 7 (depends on 1) The shaping system of claim 1, wherein the cutouts are arranged to reduce a range in actinic radiation received at mesa edges of the template to be below a range threshold. ### Claim 8 (depends on 1) The shaping system of claim 1, further comprising: a substrate chuck configured to hold a substrate; a positioning system configured to bring a mesa of the template into contact with formable material on the substrate; wherein the radiation source exposes the formable material to actinic radiation that has passed through the opening formed by the optical diaphragm. ### Claim 9 A method of shaping a film with a shaping system comprising: bringing a template into contact with formable material on a substrate; exposing the formable material to actinic radiation from a radiation source that has passed through an opening formed by an optical diaphragm; separating the template from the formable material, wherein the shaping system comprises: the radiation source; a template chuck configured to hold the template; an optical diaphragm positioned between the template chuck and the radiation source; and the optical diaphragm has a plurality of blades, each blade having a cutout in an edge of the each blade, wherein the optical diaphragm has a plurality of blades, each blade having a cutout in an edge of the each blade, wherein each blade has two cutouts with a cutout width that are separated from each other by a cutout separation distance; wherein a cutout fraction is a cutout width divided by cutout separation distance; and wherein the cutout fraction is between 0.1-0.2, wherein edges and cutouts of the plurality of blades form an opening which actinic radiation from the radiation source passes through; wherein edges and cutouts of the plurality of blades form the opening. ### Claim 10 (depends on 9) A method of manufacturing an article, further comprising: shaping a device-yielding film on a device-yielding substrate using the method of claim 9; processing the device-yielding substrate; and forming the article from the processed device-yielding substrate. ### Claim 11 (depends on 9) The method of shaping the film according to claim 9, wherein the plurality of blades includes a first blade and a second blade which are moved to intersect to form a first corner of the optical diaphragm; wherein the first blade includes a first cutout that is a first distance from the first corner; and wherein the second blade includes a second cutout that is the first distance from the first corner. ### Claim 12 (depends on 11) The method of shaping the film according to claim 11, wherein the first distance is less than a width of the cutouts. ### Claim 13 (depends on 11) The method of shaping the film according to claim 11, wherein the first cutout intersects with the second cutout.