Multiple-tip edge couplers with segmented waveguide cores
AssigneeGlobalFoundries U.S. Inc.
InventorYusheng Bian
Life of this patent
Estimating the term…
Abstract
Structures for an edge coupler and methods of fabricating a structure for an edge coupler. The structure comprises an edge coupler including a first waveguide core and a second waveguide core adjacent to the first waveguide core in a lateral direction. The first waveguide core includes a first section with a first thickness and a first plurality of segments projecting in a vertical direction from the first section. The second waveguide core includes a second section with a second thickness and a second plurality of segments projecting in the vertical direction from the second section.
Claims20
A structure comprising:
- an edge coupler including a first waveguide core and a second waveguide core adjacent to the first waveguide core in a lateral direction, the first waveguide core including a first section with a first thickness and a first plurality of segments projecting in a vertical direction from the first section, and the second waveguide core including a second section with a second thickness and a second plurality of segments projecting in the vertical direction from the second section,
- wherein the first waveguide core includes a third section with a third thickness, and the first plurality of segments have a first height relative to the first section of the first waveguide core equal to a difference between the first thickness and the third thickness.
A method comprising:
- forming an edge coupler including a first waveguide core and a second waveguide core adjacent to the first waveguide core in a lateral direction,
- wherein the first waveguide core includes a first section with a first thickness and a first plurality of segments projecting in a vertical direction from the first section, the second waveguide core includes a second section with a second thickness and a second plurality of segments projecting in the vertical direction from the second section, the first waveguide core includes a third section with a third thickness, and the first plurality of segments have a first height relative to the first section of the first waveguide core equal to a difference between the first thickness and the third thickness.
Dependencies are inferred from the claim text.