# US 12,111,427 B2 · Ultrasonic detection device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,111,427 B2 - Document ID: US12111427B2 - Status: Granted - Kind: B2 - Application number: 17/406,119 - Filed: 2021-08-19 - Published: 2022-11-24 - Granted: 2024-10-08 - Earliest claimed: 2021-05-21 - Assignees: Au Optronics Corporation - Applicants: Au Optronics Corporation - Inventors: Shyh-Bin Kuo; Tai-Hsiang Huang - Web page: https://patentgrep.com/patent/US12111427B2 ## CPC - G01S 7/5205: {Means for monitoring or calibrating} - B06B 1/0292: {Electrostatic transducers, e.g. electret-type} - G01S 7/52004: {Means for monitoring or calibrating (short-range imaging G01S7/5205)} - G01S 15/8925: {the array being a two-dimensional transducer configuration, i.e. matrix or orthogonal linear arrays} - G01S 15/8927: {using simultaneously or sequentially two or more subarrays or subapertures} - G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES - B06B: METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, {e.g.} FOR PERFORMING MECHANICAL WORK IN GENERAL (for particular applications, see the relevant subclasses, e.g. B07B1/40, B23Q17/12, B24B31/06; measurement of mechanical vibrations G01H; in direction finding, locating, distance or velocity measuring G01S; {generating seismic energy G01V1/02}; control of mechanical vibrations in general G05D; sound-producing devices, e.g. bells, sirens, whistles G10K, {e.g. methods or devices for transmitting, conducting, or directing sound in general G10K11/00}; generation of electrical oscillations H03B; electromechanical resonators in general H03H; electromechanical transducers {for communication techniques, e.g. microphones, speakers} H04R) ## Abstract An ultrasonic detection device, including a substrate, sensing elements, a first test element, a first dummy element, at least one first common signal line, sensing signal lines, and at least one test signal line, is provided. The sensing elements, the first test element, and the first dummy element are located on the substrate. The first test element is located between the sensing elements and the first dummy element. Each of the sensing elements, the first test element, and the first dummy element includes an array of capacitive microelectromechanical ultrasonic transducers. The first common signal line is electrically connected to the sensing elements and the first test element. The sensing signal lines are electrically connected to the sensing elements. The test signal line is electrically connected to the first test element. ## Claims ### Claim 1 An ultrasonic detection device, comprising: a substrate; a plurality of sensing elements, a plurality of first test elements, and a plurality of first dummy elements, located on the substrate, wherein the first test elements are located between the sensing elements and the first dummy elements, and each of the sensing elements, the first test elements, and the first dummy elements comprises an array of capacitive microelectromechanical ultrasonic transducers, wherein the sensing elements are located between the first test elements, wherein the sensing elements and the first test elements are located between the first dummy elements; at least one first common signal line, electrically connected to the sensing elements and the first test elements; a plurality of sensing signal lines, electrically connected to the sensing elements; and at least one test signal line, electrically connected to the first test elements. ### Claim 2 (depends on 1) The ultrasonic detection device according to claim 1, further comprising: a shock-absorbing material, disposed on a back surface of the substrate, wherein the sensing elements are disposed on a front surface of the substrate. ### Claim 3 (depends on 1) The ultrasonic detection device according to claim 1, wherein numbers of the capacitive microelectromechanical ultrasonic transducers of each of the sensing elements, the first test elements, and the first dummy elements are same as one another. ### Claim 4 (depends on 1) The ultrasonic detection device according to claim 1, wherein the at least one first common signal line comprises: a main portion; and a plurality of first branch portions and a plurality of second branch portions, connected to one side of the main portion, wherein the first branch portions are electrically connected to the first test elements, and the second branch portions are electrically connected to the sensing elements. ### Claim 5 (depends on 1) The ultrasonic detection device according to claim 1, further comprising: a plurality of test signal lines, electrically connected to the first test elements. ### Claim 6 (depends on 1) The ultrasonic detection device according to claim 1, further comprising: a plurality of dummy common signal lines and a plurality of dummy sensing signal lines, electrically connected to the first dummy elements, wherein the dummy common signal lines overlap with the dummy sensing signal lines. ### Claim 7 (depends on 1) The ultrasonic detection device according to claim 1, wherein a pitch between one of the first test elements and adjacent one of the sensing elements is approximately equal to or greater than a pitch between the one of the first test elements and adjacent one of the first dummy elements. ### Claim 8 An ultrasonic detection device, comprising: a substrate; a plurality of sensing elements, at least one first test element, and at least one first dummy element, located on the substrate, wherein the at least one first test element is located between the sensing elements and the at least one first dummy element, and each of the sensing elements, the at least one first test element, and the at least one first dummy element comprises an array of capacitive microelectromechanical ultrasonic transducers; at least one first common signal line, electrically connected to the sensing elements and the at least one first test element; a plurality of sensing signal lines, electrically connected to the sensing elements; and at least one test signal line, electrically connected to the at least one first test element, wherein the sensing elements, the at least one first test element, and the at least one first dummy element are arranged in a first direction. ### Claim 9 (depends on 1) The ultrasonic detection device according to claim 1, wherein each of the capacitive microelectromechanical ultrasonic transducers comprises a first electrode and a second electrode separated from the first electrode, and the first electrodes of the capacitive microelectromechanical ultrasonic transducers of the first dummy elements are floating electrodes. ### Claim 10 (depends on 9) The ultrasonic detection device according to claim 9, wherein the second electrodes of the capacitive microelectromechanical ultrasonic transducers of the first dummy elements are floating electrodes. ### Claim 11 (depends on 9) The ultrasonic detection device according to claim 9, wherein the first electrodes of the capacitive microelectromechanical ultrasonic transducers of the sensing elements, the first electrodes of the capacitive microelectromechanical ultrasonic transducers of the first test elements, and the at least one first common signal line are connected as one. ### Claim 12 (depends on 9) The ultrasonic detection device according to claim 9, wherein the second electrodes of the capacitive microelectromechanical ultrasonic transducers of one of the sensing elements are integrated with a corresponding one of the sensing signal lines. ### Claim 13 (depends on 9) The ultrasonic detection device according to claim 9, further comprising: an insulating layer, located on the first electrodes and the at least one first common signal line, wherein the insulating layer has a plurality of grooves, and each of the grooves overlaps with a plurality of corresponding capacitive microelectromechanical ultrasonic transducers. ### Claim 14 (depends on 1) The ultrasonic detection device according to claim 1, wherein the substrate comprises a curved surface, and the sensing elements, the first test elements, and the first dummy elements are located on the curved surface. ### Claim 15 An ultrasonic detection device, comprising: a substrate; a plurality of sensing elements, at least one first test element, and at least one first dummy element, located on the substrate, wherein the at least one first test element is located between the sensing elements and the at least one first dummy element, and each of the sensing elements, the at least one first test element, and the at least one first dummy element comprises an array of capacitive microelectromechanical ultrasonic transducers, wherein the at least one first test element comprises a capacitive microelectromechanical ultrasonic transducer that collapses after a test process; at least one first common signal line, electrically connected to the sensing elements and the at least one first test element; a plurality of sensing signal lines, electrically connected to the sensing elements; and at least one test signal line, electrically connected to the at least one first test element. ### Claim 16 (depends on 1) The ultrasonic detection device according to claim 1, wherein the number of the at least one first common signal line is plural, wherein each of the first common signal lines extending along a first direction is electrically connected to corresponding two of the first test elements, corresponding two of the first dummy elements, and corresponding ones of the sensing elements located between the corresponding two of the first test elements in the first direction. ### Claim 17 (depends on 16) The ultrasonic detection device according to claim 16, further comprising: a plurality of second test elements and a plurality of second dummy elements, located on the substrate, wherein the sensing signal lines extend along a second direction, and each of the sensing signal lines is electrically connected to corresponding two of the second test elements, corresponding two of the second dummy elements, and corresponding other ones of the sensing elements located between the corresponding two of the second test elements in the second direction; a plurality of third test elements, a plurality of third dummy elements, a plurality of fourth dummy elements, and a plurality of fifth dummy elements, located on the substrate; a plurality of test signal lines, extending along the second direction, wherein each of the test signal lines is electrically connected to corresponding two of the third test elements, corresponding two of the third dummy elements, and corresponding ones of the first test elements located between the corresponding two of the third test elements in the second direction; and a plurality of dummy sensing signal lines, extending along the second direction, wherein each of the dummy sensing signal lines is electrically connected to corresponding two of the fourth dummy elements, corresponding two of the fifth dummy elements, and corresponding ones of the first dummy elements located between the corresponding two of the fifth dummy elements in the second direction, and the test signal lines are located between the sensing signal lines and the dummy sensing signal lines. ### Claim 18 (depends on 17) The ultrasonic detection device according to claim 17, further comprising: a plurality of dummy common signal lines, extending along the first direction, wherein each of the dummy common signal lines is electrically connected to corresponding other two of the third dummy elements, corresponding other two of the fourth dummy elements, and corresponding ones of the second dummy elements located between the corresponding other two of the third dummy elements in the first direction; and a plurality of test common signal lines, extending along the first direction, wherein each of the test common signal lines is electrically connected to corresponding other two of the third test elements, corresponding other two of the fifth dummy elements, and corresponding ones of the second test elements located between the corresponding other two of the third test elements in the first direction.