# US 12,111,249 B2 · MEMS-based photoacoustic cell > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,111,249 B2 - Document ID: US12111249B2 - Status: Granted - Kind: B2 - Application number: 17/638,665 - Filed: 2020-08-31 - Published: 2022-09-22 - Granted: 2024-10-08 - Earliest claimed: 2019-08-29 - Assignees: Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. - Applicants: Hahn-Schickard-Gesellschaft für Angewandte Forschung e. V. - Inventors: Alfons Dehé; Achim Bittner; Lenny Castellanos; Sophie Billat; Frank Hedrich - Web page: https://patentgrep.com/patent/US12111249B2 ## CPC - G01N 21/1702: {with opto-acoustic detection, e.g. for gases or analysing solids} - G01F 1/6845: {Micromachined devices} - G01N 29/2425: {optoacoustic fluid cells therefor} - G01N 2021/1704: {in gases} - G01N 2021/1708: {with piezotransducers} - G01N 2201/0686: Cold filter; IR filter - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - G01F: MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME ## Abstract In a first aspect, the invention relates to a photoacoustic gas sensor comprising a gas-fillable detection chamber and a reference chamber arranged laterally adjacent to each other and connected by a sensor channel. A sensor located at or in the sensor channel allows measurement of the photoacoustic signals. Both chambers are preferably located in a plane perpendicular to the emitted IR radiation of the IR emitter which is also comprised. The gas sensor is also formed from a multilayer substrate. In further aspects, the invention also relates to a method of manufacturing a gas sensor and a method of analyzing gas with a gas sensor. ## Claims ### Claim 1 A photoacoustic gas sensor comprising: a modulable infrared emitter, a gas-fillable detection chamber, a reference chamber, a sensor channel connecting the detection chamber to the reference chamber, and a sensor which is located in the sensor channel or is adjacent to the sensor channel, wherein the detection chamber is present in the beam path of the infrared emitter such that the infrared emitter can excite gas in the detection chamber by means of modulably emittable infrared radiation to generate a sound pressure and an equalization of the sound pressure through the sensor channel into the reference chamber can be detected by means of the sensor, wherein the detection chamber, the sensor channel, the reference chamber and the sensor are arranged in a lateral plane which is substantially perpendicular to the radiation direction of the IR emitter, and wherein the detection chamber, the sensor channel, the reference chamber and the sensor element are formed in a multilayer substrate and wherein the reference chamber and the sensor channel with the sensor are not located in the beam path of the infrared emitter. ### Claim 2 (depends on 1) The photoacoustic gas sensor according to claim 1 wherein the multilayer substrate comprises at least two substrate layers selected from the group consisting of monocrystalline silicon, polysilicon, silicon dioxide, silicon carbide, silicon germanium, silicon nitride, nitride, germanium, carbon, gallium arsenide, gallium nitride, indium phosphide and glass. ### Claim 3 (depends on 1) The photoacoustic gas sensor according to claim 1, wherein the multilayer substrate is formed by bonding at least two wafers, preferably comprising a lower system wafer comprising the sensor and having at least one lower cavity and an upper cap wafer having upper cavities complementary to the at least one lower cavity such that the reference chamber and detection chamber are formed by bonding the lower system wafer and the upper cap wafer. ### Claim 4 (depends on 1) The photoacoustic gas sensor according to claim 1, wherein the detector chamber and/or the reference chamber has a height of from 10 μm to 2 mm. ### Claim 5 (depends on 1) The photoacoustic gas sensor according to claim 1, wherein the detector chamber and/or the reference chamber has a length or width of from 100 μm to 5 mm. ### Claim 6 (depends on 1) The photoacoustic gas sensor according to claim 1, wherein the sensor channel has a length of from 1 μm to 500 μm. ### Claim 7 (depends on 1) The photoacoustic gas sensor according to claim 1, wherein the sensor channel has a cross-section of from 1 μm2 to 250 000 μm2. ### Claim 8 (depends on 1) The photoacoustic gas sensor according to claim 1, wherein the sensor is a sound pressure detector. ### Claim 9 (depends on 1) The photoacoustic gas sensor according to claim 1, wherein the sensor is a capacitive microphone comprising a MEMS membrane as an electrode as well as a counter electrode. ### Claim 10 (depends on 1) The photoacoustic gas sensor according to claim 1, wherein the sensor is a flow sensor. ### Claim 11 (depends on 10) The photoacoustic gas sensor according to claim 10, wherein the flow sensor is located in the sensor channel and forms an aperture. ### Claim 12 (depends on 1) The photoacoustic gas sensor according to claim 1, wherein the detection chamber and the reference chamber are at least partially separated by a partition, having at least one aperture forming the sensor channel and wherein the sensor is at least partially arranged on the partition and is adapted to measure a gas flow between the detection chamber and reference chamber through the at least one aperture. ### Claim 13 (depends on 12) The photoacoustic gas sensor according to claim 12, wherein the sensor comprises at least one heating element and at least one temperature sensor, which are installed on the partition such that the at least one aperture is located between the heating element and the at least one temperature sensor, such that a gas flow between the detection chamber and the reference chamber is measurable through the at least one aperture based on a modulation of a heat flow along the partition between the heating element and the at least one temperature sensor. ### Claim 14 (depends on 12) The photoacoustic gas sensor according to claim 12, wherein the sensor comprises at least one heating element, which has openings corresponding to the at least one aperture and is installed on the partition, and wherein a gas flow between the detection chamber and the reference chamber through the at least one aperture and the corresponding opening of the heating element can be measured by cooling of the heating element. ### Claim 15 (depends on 12) The photoacoustic gas sensor according to claim 12, wherein the partition has at least 2, 3, 4, 5, 6, 7, 8, 9, 10 or more apertures. ### Claim 16 (depends on 12) The photoacoustic gas sensor according to claim 12, wherein the at least one aperture has a cross-sectional area between 1 μm2 and 10 000 μm2. ### Claim 17 (depends on 1) The photoacoustic gas sensor according to claim 1, wherein the detector chamber, the sensor channel and the reference chamber form a closed system which is filled with a reference gas and a gas to be analyzed is present in the beam path between the infrared emitter and the detection chamber, so that the proportion of the reference gas in the gas to be analyzed can be measured on the basis of the formation of sound pressure waves in the detection chamber. ### Claim 18 (depends on 1) The photoacoustic gas sensor according to claim 1, wherein the detection chamber is an open system having one or more openings such that a gas to be analyzed can flow or diffuse into the detection chamber. ### Claim 19 (depends on 18) The photoacoustic gas sensor according to claim 18, wherein the detection chamber has two or more openings with a maximum extension in at least one direction of 1 nm to 500 μm. ### Claim 20 (depends on 1) The photoacoustic gas sensor according to claim 1, wherein the infrared emitter permits wavelength-selective radiation and/or a wavelength-selective filter is located in the beam path between the infrared emitter and the detection chamber. ### Claim 21 (depends on 1) A method of manufacturing the photoacoustic gas sensor according to claim 1 comprising the steps of: providing at least two substrate layers; depositing at least one layer of a conductive material on a first substrate layer and/or structuring a conductive material on the first substrate layer to form a MEMS sensor; etching cavities in the first and/or second substrate layer, and bonding the first substrate layer to the second substrate layer to form the detection chamber, the reference chamber and the sensor channel, wherein the sensor channel connects the detection chamber to the reference chamber and the sensor is integrated in the sensor channel or is adjacent to the sensor channel. ### Claim 22 (depends on 21) The manufacturing process according to claim 21, wherein: the etching and/or structuring is selected from the group comprising dry etching, wet chemical etching and/or plasma etching, in particular reactive ion etching, reactive ion deep etching (Bosch process); the deposition is selected from the group comprising physical vapor deposition (PVD), in particular thermal evaporation, laser beam evaporation, arc evaporation, molecular beam epitaxy, sputtering, chemical vapor deposition (CVD) and/or atomic layer deposition (ALD), and/or the bonding of the substrate layers is selected from the group comprising wafer bonding, direct bonding, surface activated bonding, plasma activated bonding, anodic bonding, eutectic bonding, weld bonding, glass frit bonding and/or adhesive bonding. ### Claim 23 (depends on 1) A method for analyzing gas comprising: a. providing a photoacoustic gas sensor for analyzing gas according to claim 1, b. providing a gas to be analyzed in the beam path between the infrared emitter and the detection chamber or within the detection chamber, c. irradiating the gas to be analyzed and the detection chamber with infrared radiation modulated with a modulation frequency in order to generate sound pressure waves, d. measuring the generated sound pressure waves by means of the sensor, and e. characterizing the gas to be analyzed based on the measurement results.