# US 12,111,219 B2 · Pressure sensor, manufacturing method thereof, and display device having the same

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- Number: US 12,111,219 B2
- Document ID: US12111219B2
- Status: Granted
- Kind: B2
- Application number: 18/104,672
- Filed: 2023-02-01
- Published: 2023-06-08
- Granted: 2024-10-08
- Earliest claimed: 2017-11-20
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.; Research & Business Foundation Sungkyunkwan University
- Inventors: Jae Ik Lim; Won Sang Park; Hye Yong Chu; Do-Il Kim; Nae-Eung Lee; Han-Byeol Lee
- Web page: https://patentgrep.com/patent/US12111219B2

## CPC

- G01L 19/148: {Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation}
- G01L 1/148: {using semiconductive material, e.g. silicon}
- G01L 1/16: using properties of piezoelectric devices
- G01L 1/26: Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)

## Abstract

A pressure sensor includes: a base substrate including an embossed pattern; a first conductive layer disposed on the base substrate; a pressure sensitive material layer disposed on the first conductive layer such that its electrical characteristic is varied corresponding to a strain applied thereto, the pressure sensitive material layer including a dielectric and nanoparticles dispersed in the dielectric; and a second conductive layer disposed on the pressure sensitive material layer, wherein the dielectric and the nanoparticle include materials having pyroelectricities of polarities opposite to each other.

## Claims

### Claim 1

A method of manufacturing a pressure sensor, the method comprising:
preparing a base substrate including an embossed pattern;
forming a first conductive layer on the base substrate, wherein the first conductive layer has a curved surface corresponding to the embossed pattern;
fixing the base substrate including the first conductive layer to an omnidirectional stretching device and then planarizing the curved surface of the first conductive layer by applying a tensile force to the base substrate in all directions;
forming a pressure sensitive material layer on the first conductive layer having the planarized surface, wherein the pressure sensitive material includes a dielectric and nanoparticles dispersed in the dielectric; and
forming a second conductive layer on the pressure sensitive material layer,
where the dielectric and the nanoparticle include materials having pyroelectricities of polarities opposite to each other.

### Claim 2 (depends on 1)

The method of claim 1, further comprising:
after forming the pressure sensitive material layer, removing the tensile force applied to the base substrate by separating the base substrate from the omnidirectional stretching device; and
crystallizing the pressure sensitive material layer through heat treatment.

### Claim 3 (depends on 1)

The method of claim 1, wherein the pressure sensitive material layer is formed on the base substrate including the first conductive layer using spin coating.

### Claim 4 (depends on 1)

The method of claim 1, wherein the dielectric includes a ferroelectric piezoelectric material having a positive (+) pyroelectricity, and the nanoparticle includes a barium titanate (BaTiO3) nanoparticle, a lithium titanate (BaTiO3) nanoparticle, a lead zirconate titanate (PZT) nanoparticle, a lead titanate (PbTiO3) nanoparticle, and a Pb5Ge3O11 nanoparticle, which have a negative (−) pyroelectricity.

### Claim 5 (depends on 4)

The method of claim 4, wherein, in the pressure sensitive material layer, the nanoparticles have a concentration of about 30 wt % to 40 wt %.

### Claim 6

A display device comprising:
a display panel configured to display an image; and
a pressure sensor disposed on one surface of the display panel, the pressure sensor sensing the pressure of a touch applied to the display panel,
wherein the pressure sensor includes:
a base substrate including an embossed pattern;
a first conductive layer disposed on the base substrate;
a pressure sensitive material layer disposed on the first conductive layer such that its electrical characteristic is varied corresponding to a strain applied thereto, the pressure sensitive material layer including a dielectric and nanoparticles dispersed in the dielectric; and
a second conductive layer disposed on the pressure sensitive material layer,
wherein the dielectric and the nanoparticle include materials having pyroelectricities of polarities opposite to each other,
wherein the pressure sensitive material layer is formed by depositing the pressure sensitive material layer on the substrate while the substrate is stretched, and
wherein the first conductive layer has a curved surface corresponding to the embossed pattern.

### Claim 7 (depends on 6)

The display device of claim 6, wherein the dielectric includes a ferroelectric piezoelectric material having a positive (+) pyroelectricity, and the nanoparticle includes a barium titanate (BaTiO3) nanoparticle, a lithium titanate (BaTiO3) nanoparticle, a lead zirconate titanate (PZT) nanoparticle, a lead titanate (PbTiO3) nanoparticle, and a Pb5Ge3O11 nanoparticle, which have a negative (−) pyroelectricity.

### Claim 8 (depends on 7)

The display device of claim 7, wherein, in the pressure sensitive material layer, the nanoparticles have a concentration of about 30 wt % to 40 wt %.

### Claim 9 (depends on 6)

The display device of claim 6, wherein the embossed pattern includes:
a plurality of protrusion parts protruding from a surface of the base substrate on which the first conductive layer is formed; and
a valley provided between adjacent protrusion parts.

### Claim 10 (depends on 9)

The display device of claim 9, further comprising a plurality of dummy patterns provided at the peak of the protrusion part.

### Claim 11 (depends on 6)

The display device of claim 6, wherein the display panel includes:
a substrate including a display region in which the image is to be displayed and a non-display region disposed at one side of the display region; and
a plurality of pixels provided in the display region, the plurality of pixels each including at least one transistor and a light emitting device connected to the transistor.

### Claim 12 (depends on 11)

The display device of claim 11, wherein the pressure sensor is disposed on a surface of the display panel opposite to a surface that is in the direction in which light is emitted.

### Claim 13 (depends on 11)

The display device of claim 11, wherein each of the base substrate and the substrate of the display panel has flexibility.