# US 12,111,207 B2 · Despeckling in optical measurement systems

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- Number: US 12,111,207 B2
- Document ID: US12111207B2
- Status: Granted
- Kind: B2
- Application number: 18/234,794
- Filed: 2023-08-16
- Published: 2024-03-28
- Granted: 2024-10-08
- Earliest claimed: 2022-09-23
- Assignees: Apple Inc.
- Applicants: Apple Inc.
- Inventors: Matthew A Terrel; David S Gere; Alexander F Sugarbaker; Thomas C Greening; Jason S Pelc; Mark A. Arbore
- Web page: https://patentgrep.com/patent/US12111207B2

## CPC

- G01J 1/44: Electric circuits {(for command of an exposure part G03B7/02)}
- G01S 7/4815: {using multiple transmitters}
- G02B 6/43: Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
- G01J 2001/444: {Compensating; Calibrating, e.g. dark current, temperature drift, noise reduction or baseline correction; Adjusting}
- G01N 21/255: {Details, e.g. use of specially adapted sources, lighting or optical systems}
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

Embodiments are directed to optical measurement systems that utilize multiple emitters to emit light during a measurement, as well as methods of performing measurements using these optical measurement systems. The optical measurement systems may include a light generation assembly that is configured to generate light via a light source unit, and a photonic integrated circuit that includes a launch group having a plurality of emitters. Each of these emitters is optically coupled to the light generation assembly to receive light generated from the light generation assembly, and may emit this light from a surface of the photonic integrated circuit. The optical measurement system may perform a measurement in which the light generation assembly generates light and each of the plurality of emitters simultaneously emit light received from the light generation assembly.

## Claims

### Claim 1

An optical measurement system comprising:
a light generation assembly comprising a light source unit that is configured to generate light;
a photonic integrated circuit comprising a launch group, the launch group comprising a plurality of emitters optically coupled to the light generation assembly to receive light generated by the light generation assembly;
a detector group; and
a controller configured to perform a measurement using the light generation assembly, the launch group, and the detector group, wherein the measurement comprises:
generating light using the light source unit;
simultaneously emitting the generated light from each of the plurality of emitters such that the plurality of emitters emits light at a corresponding set of phase states defined by a measurement state;
changing, during the simultaneous emission of the generated light, the measurement state between a plurality of target measurement states having a common phase state distribution;
measuring, using the detector group, return light received during the simultaneous emission of the generated lighted light, wherein:
during the measurement, the plurality of emitters only emits light at measurement states having the common phase state distribution.

### Claim 2 (depends on 1)

The optical measurement system of claim 1, wherein:
the launch group is a first launch group;
the photonic integrated circuit comprises a plurality of launch groups that includes the first launch group, such that each launch group of the plurality of launch groups is optically coupled to the light generation assembly to receive light generated by the light generation assembly;
the detector group is a first detector group; and
the optical measurement system comprises a plurality of detector groups that includes the first detector group.

### Claim 3 (depends on 2)

The optical measurement system of claim 2, wherein:
the measurement is a first measurement;
the plurality of launch groups comprises a second launch group;
the plurality of detector groups comprises a second detector group; and
the controller is configured to perform a second measurement using the light generation assembly, the second launch group, and the second detector group.

### Claim 4 (depends on 3)

The optical measurement system of claim 3, wherein:
the controller is configured to perform the first measurement concurrently with the second measurement.

### Claim 5 (depends on 4)

The optical measurement system of claim 4, wherein:
the photonic integrated circuit comprises a phase shifter array having a plurality of phase shifters;
each phase shifter of the plurality of phase shifters is controllable to change a phase state of light emitted by a corresponding emitter of the plurality of emitters; and
the controller is configured to, during the measurement, control the phase shifter array to adjust the relative phase states of the plurality of emitters such that plurality of emitters emits light at the corresponding set of phase states for each of the plurality of target measurement states.

### Claim 6 (depends on 5)

The optical measurement system of claim 5, comprising:
a driver configured to control the phase state of each phase shifter of the plurality of phase shifters.

### Claim 7 (depends on 6)

The optical measurement system of claim 6, wherein:
the driver comprises a plurality of switch-shifter pairs connected in series to a power supply; and
each switch-shifter pair of the plurality of switch-shifter pairs comprises:
a corresponding phase shifter of the plurality of phase shifters; and
a switch connected in parallel to the corresponding phase shifter of the plurality of phase shifters.

### Claim 8 (depends on 6)

The optical measurement system of claim 6, wherein:
the driver comprises a plurality of controllable current sources connected in parallel to a power supply; and
each controllable current source of the controllable current source is connected in series to a corresponding phase shifter of the plurality of phase shifters.

### Claim 9 (depends on 1)

The optical measurement system of claim 1, wherein:
the light generation assembly comprises a switch network that optically couples the light source unit to the plurality of emitters.

### Claim 10 (depends on 1)

The optical measurement system of claim 1, further comprising:
an interposer, wherein:
the photonic integrated circuit and the plurality of detector groups are mounted on the interposer.

### Claim 11 (depends on 1)

The optical measurement system of claim 1, wherein:
each phase state of plurality of the target measurement states is selected from a binary pair of candidate phase states.

### Claim 12

An optical measurement system comprising:
a light generation assembly comprising a light source unit that is configured to generate light;
a photonic integrated circuit comprising a launch group and a phase shifter array; and
a controller, wherein:
the launch group comprises a plurality of emitters;
each emitter of the plurality of emitters is optically coupled to the light generation assembly to receive light generated by the light generation assembly and emit a corresponding beam of light;
the phase shifter array comprises a plurality of phase shifters;
each phase shifter of the plurality of phase shifters is controllable to set a phase state of the beam of light emitted by a corresponding emitter of the plurality of emitters; and
the controller is configured to:
control the light generation assembly to generate light such that the plurality of emitters simultaneously emits light from the photonic integrated circuit; and
control, while the plurality of emitters simultaneously emits light, the phase shifter array to repeatedly cycle a measurement state of the plurality of emitters between a plurality of target measurement states; wherein:
each of the plurality of target measurements states has a common phase state distribution.

### Claim 13 (depends on 12)

The optical measurement system of claim 12, comprising:
a detector group, wherein the controller is configured to measure, using the detector group, return light received while the plurality of emitters simultaneously emits light.

### Claim 14 (depends on 13)

The optical measurement system of claim 13, further comprising:
an interposer, wherein:
the photonic integrated circuit and the plurality of detector groups are mounted on the interposer.

### Claim 15 (depends on 12)

The optical measurement system of claim 12, comprising:
a driver configured to control the phase state of each phase shifter of the plurality of phase shifters.

### Claim 16 (depends on 15)

The optical measurement system of claim 15, wherein:
a driver controls the phase state of each phase shifter of the plurality of phase shifters based on a phase encoding matrix.

### Claim 17 (depends on 15)

The optical measurement system of claim 15, wherein:
the driver comprises a plurality of switch-shifter pairs connected in series to a power supply; and
each switch-shifter pair of the plurality of switch-shifter pairs comprises:
a corresponding phase shifter of the plurality of phase shifters; and
a switch connected in parallel to the corresponding phase shifter of the plurality of phase shifters.

### Claim 18 (depends on 15)

The optical measurement system of claim 15, wherein:
the driver comprises a plurality of controllable current sources connected in parallel to a power supply; and
each controllable current source of the controllable current source is connected in series to a corresponding phase shifter of the plurality of phase shifters.

### Claim 19 (depends on 12)

The optical measurement system of claim 12, wherein:
the light generation assembly comprises a switch network that optically couples the light source unit to the plurality of emitters.

### Claim 20 (depends on 12)

The optical measurement system of claim 12, wherein:
each phase state of plurality of the target measurement states is selected from a binary pair of candidate phase states.

### Claim 21 (depends on 12)

The optical measurement system of claim 12, wherein:
the plurality of target measurement states is a first plurality of target measurement states;
the common phase state distribution is a first common phase state distribution;
the controller is configured to control, while the plurality of emitters simultaneously emits light, the phase shifter array to repeatedly cycle a measurement state of the plurality of emitters between a second plurality of target measurement states; and
the second plurality of target measurement states has a second common phase state distribution different than the first phase state distribution.

### Claim 22

A method of performing a measurement using an optical measurement system, the method comprising:
simultaneously emitting light from a plurality of emitters of a launch group of a photonic integrated circuit; and
performing a measurement sequence comprising a first measurement stage and a second measurement stage, wherein:
performing the first measurement stage comprises:
controlling, while the plurality of emitters simultaneously emits light, a phase shifter array to perform at least one first iteration in which a measurement state of the plurality of emitters is changed between a first plurality of target measurement states having a first common phase state distribution; and
measuring, using a detector group, return light received during the at least one first iteration; and
performing the second measurement stage comprises:
controlling, while the plurality of emitters simultaneously emits light, the phase shifter array to perform at least one second iteration in which the measurement state of the plurality of emitters is changed between a second plurality of target measurement states having a second common phase state distribution that is different than the first common phase state distribution; and
measuring, using the detector group, return light received during the at least one second iteration.

### Claim 23 (depends on 22)

The method of claim 22, wherein:
performing the first measurement stage comprises performing multiple first iterations.

### Claim 24 (depends on 22)

The method of claim 22, wherein:
performing the second measurement stage comprises performing multiple second iterations.

### Claim 25 (depends on 22)

The method of claim 22, comprising:
repeating the measurement sequence.

### Claim 26 (depends on 25)

The method of claim 25, wherein:
repeating the measurement sequence comprises changing an order of the first measurement stage and the second measurement stage.