# US 12,110,938 B2 · Vibration isolation table for semiconductor equipment and vibration isolation table system including the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,110,938 B2 - Document ID: US12110938B2 - Status: Granted - Kind: B2 - Application number: 17/718,423 - Filed: 2022-04-12 - Published: 2023-03-16 - Granted: 2024-10-08 - Earliest claimed: 2021-09-14 - Assignees: Samsung Electronics Co., Ltd. - Applicants: Samsung Electronics Co., Ltd. - Inventors: Hyunchul Kim; Souk Kim; Younghoon Sohn - Web page: https://patentgrep.com/patent/US12110938B2 ## CPC - F16F 7/00: Vibration-dampers; Shock-absorbers (using fluid F16F5/00, F16F9/00; specific for rotary systems F16F15/10 {; belt tensioners F16H7/12}) - F16F 15/02: Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems ({F16F15/005 takes precedence } ; layered products B32B; suppression of vibration in ships B63; {relieving load on bearings, using magnetic means F16C39/06}) - F16F: SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION ## Abstract A vibration isolation table of the disclosure may include a lower structure including a plurality of block structures, a middle structure on the lower structure, and an upper structure on the middle structure. The plurality of block structures may be spaced apart from one another such that a space is formed between adjacent ones of the plurality of block structures. At least one of the lower structure and the upper structure may include high attenuation concrete. ## Claims ### Claim 1 A vibration isolation table for semiconductor equipment, the vibration isolation table comprising: a lower structure comprising a plurality of block structures that are elongated in a first direction; a middle structure on the lower structure; and an upper structure on the middle structure, wherein the plurality of block structures are spaced apart from one another in a second direction perpendicular to the first direction such that a space is formed between adjacent ones of the plurality of block structures, wherein at least one of the lower structure and the upper structure comprises high attenuation concrete, wherein the high attenuation concrete comprises a polymer and concrete, wherein the high attenuation concrete has a higher vibration attenuation than the concrete, and wherein the lower structure has a length in the first direction greater than a length of the upper structure in the first direction. ### Claim 2 (depends on 1) The vibration isolation table according to claim 1, wherein at least one of the plurality of block structures of the lower structure comprises: an inner filling portion comprising the high attenuation concrete; and an outer frame portion surrounding the inner filling portion. ### Claim 3 (depends on 2) The vibration isolation table according to claim 2, further comprising: a plurality of reinforcements interconnecting the plurality of block structures. ### Claim 4 (depends on 3) The vibration isolation table according to claim 3, wherein each of the plurality of reinforcements is connected to the outer frame portion. ### Claim 5 (depends on 3) The vibration isolation table according to claim 3, wherein each of the plurality of reinforcements extends through the outer frame portion and into the inner filling portion. ### Claim 6 (depends on 1) The vibration isolation table according to claim 1, wherein the upper structure comprises: an inner filling portion comprising the high attenuation concrete; and an outer frame portion surrounding the inner filling portion. ### Claim 7 (depends on 1) The vibration isolation table according to claim 1, wherein the middle structure is a single H-beam comprising an iron-based material. ### Claim 8 (depends on 1) The vibration isolation table according to claim 1, wherein the middle structure comprises a plurality of H-beams. ### Claim 9 (depends on 8) The vibration isolation table according to claim 8, wherein the plurality of H-beams are spaced apart from one another. ### Claim 10 (depends on 9) The vibration isolation table according to claim 9, wherein the upper structure is vertically aligned with all of the plurality of block structures and the plurality of H-beams. ### Claim 11 (depends on 1) The vibration isolation table according to claim 1, further comprising: an adhesive material between the middle structure and the upper structure. ### Claim 12 (depends on 11) The vibration isolation table according to claim 11, wherein the adhesive material comprises epoxy. ### Claim 13 A vibration isolation table system for semiconductor equipment, the vibration isolation table system comprising: an independent foundation structure comprising a floor support and a lattice beam; a vibration isolation table on the independent foundation structure; and a support structure disposed around the vibration isolation table on the independent foundation structure, wherein the vibration isolation table comprises a lower structure comprising a plurality of block structures, an H-beam on the lower structure, and an upper structure on the H-beam, wherein the plurality of block structures extend and are elongated in a first direction, and are spaced apart from one another in a second direction perpendicular to the first direction such that a space is formed between adjacent ones of the plurality of block structures, wherein the H-beam is vertically aligned with each of the plurality of block structures and is elongated in the second direction such that the H-beam extends over each of the plurality of block structures, wherein at least one of the lower structure and the upper structure comprises high attenuation concrete comprising a polymer and concrete, wherein the high attenuation concrete has a higher vibration attenuation than the concrete, and wherein the lower structure has a length in the first direction greater than a length of the H-beam in the first direction. ### Claim 14 (depends on 13) The vibration isolation table system according to claim 13, wherein: the plurality of block structures comprise a first block structure and a second block structure which extend and are elongated in the first direction, and the first block structure and the second block structure are spaced apart from each other in the second direction perpendicular to the first direction; and the H-beam is vertically aligned with each of the first block structure and the second block structure and is elongated in the second direction. ### Claim 15 (depends on 13) The vibration isolation table system according to claim 13, wherein each of the plurality of block structures comprises: an inner filling portion comprising the high attenuation concrete; and an outer frame portion surrounding the inner filling portion. ### Claim 16 (depends on 13) The vibration isolation table system according to claim 13, wherein the upper structure is vertically aligned with the lower structure and the H-beam, and has a parallelepiped shape. ### Claim 17 (depends on 13) The vibration isolation table system according to claim 13, further comprising: a plurality of reinforcements interconnecting the plurality of block structures. ### Claim 18 (depends on 13) The vibration isolation table system according to claim 13, wherein: the lower structure further comprises a protrusion extending from a side surface of the lower structure, the protrusion comprising a hole; and the lower structure is coupled to the lattice beam or the H-beam via the protrusion and a fastener extending through the hole. ### Claim 19 A vibration isolation table for semiconductor equipment, the vibration isolation table comprising: a lower structure comprising a first block, a second block and a third block, each of which is elongated in a first direction and has a bar shape, the first to third blocks being spaced apart from one another in a second direction perpendicular to the first direction such that a space is formed between adjacent ones the first to third blocks; an H-beam on the lower structure, the H-beam vertically overlapping only a portion of each of the first to third blocks while being elongated in the second direction; and an upper structure on the H-beam, the upper structure vertically overlapping at least a portion of each of the first to third blocks and at least a portion of the H-beam and having a parallelepiped shape, wherein at least one of the lower structure and the upper structure comprises high attenuation concrete comprising a polymer and concrete, and wherein the high attenuation concrete has a higher vibration attenuation than the concrete.