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US 12,110,608 B2Granted
Apparatus of oxidation-combusting an ingot grower and method thereof
AssigneeSK Siltron Co., Ltd.
InventorJung Ryul Kim
Life of this patent
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Abstract
A method of oxidation-combusting an ingot grower comprises a) blocking between the filter housing and the exhaust pipe, b) forming the filter housing in a vacuum state, and c) injecting air into the filter housing through an injection pipe connected to a first side of the filter housing to combust the filter housing.
Claims13
A method of oxidation-combusting an ingot grower comprising a chamber, an exhaust pipe connected to the chamber, and a filter housing connected to the exhaust pipe, the method comprising:
- a) blocking flow between the filter housing and the exhaust pipe;
- b) forming a vacuum state in the filter housing;
- c) injecting air into the filter housing through an injection pipe connected to a first side of the filter housing to combust deposits of the filter housing;
- repeating the steps b) and c);
- measuring the temperature of the filter housing;
- and
- forming a circulation structure in which the air flows to the injection pipe, the filter housing, and the exhaust pipe connected to a second side of the filter housing when the measured temperature of the filter housing is greater than a predetermined temperature.
4 more elements
An apparatus of oxidation-combusting an ingot grower, the apparatus comprises:
- a chamber;
- an exhaust pipe connected to the chamber;
- a filter housing connected to the exhaust pipe;
- an injection pipe connected to a first side of the filter housing;
- a discharge pipe connected to a second side of the filter housing;
- at least one temperature sensor installed at a point far from the injection pipe to measure the temperature of the filter housing;
- and
- a controller, wherein the controller is configured to:
- block flow between the filter housing and the exhaust pipe and forming a vacuum state in the filter housing, and
- inject air into the filter housing through the injection pipe to combust deposits of the filter housing, and
- repeatedly perform the process of forming the vacuum state and the process of combusting the deposits of the filter housing.
8 more elements
Dependencies are inferred from the claim text.