# US 12,110,547 B2 · Selective surface patterning via nanoimprinting

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- Number: US 12,110,547 B2
- Document ID: US12110547B2
- Status: Granted
- Kind: B2
- Application number: 17/033,237
- Filed: 2020-09-25
- Published: 2021-01-14
- Granted: 2024-10-08
- Earliest claimed: 2015-07-07
- Assignees: Illumina, Inc.
- Applicants: Illumina, Inc.
- Inventors: Andrew A. Brown; Wayne N. George; Alexandre Richez; M. Shane Bowen
- Web page: https://patentgrep.com/patent/US12110547B2

## CPC

- C12Q 1/6874: involving nucleic acid arrays, e.g. sequencing by hybridisation
- G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping}
- G03F 7/161: {using a previously coated surface, e.g. by stamping or by transfer lamination}
- B01L 3/5085: {for multiple samples, e.g. microtitration plates}
- B01L 2200/12: Specific details about manufacturing devices
- B01L 2200/16: Reagents, handling or storing thereof
- B01L 2300/069: Absorbents; Gels to retain a fluid
- B01L 2300/0819: Microarrays; Biochips
- B01L 2300/0829: Multi-well plates; Microtitration plates
- B01L 2300/0887: Laminated structure
- B01L 2300/161: Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
- G01N 21/645: {Specially adapted constructive features of fluorimeters}
- C12Q: MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS (immunoassay G01N33/53); COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

Substrates comprising dual functional polymer layered surfaces and the preparation thereof by using UV nano-imprinting processes are disclosed. The substrates can be used as flow cells, nanofluidic or microfluidic devices for biological molecules analysis.

## Claims

### Claim 1

A system, comprising:
a substrate having a surface;
a first polymer layer disposed on the substrate surface, wherein the first polymer layer comprises a first plurality of functional groups and further comprises an imprinted pattern of features; and
a second polymer layer disposed over at least a portion of the first polymer layer;
wherein the first plurality of functional groups provide reactive sites for covalent bonding of a functionalized molecule and the second polymer layer comprises a second plurality of functional groups that differ from the first plurality of functional groups;
wherein a first region of the system is defined where the first polymer layer is exposed; and
wherein a second region of the system is defined where the second polymer layer is exposed.

### Claim 2 (depends on 1)

The system of claim 1, wherein the first and the second polymer layers do not comprise silicon or silicon oxide.

### Claim 3 (depends on 1)

The system of claim 1, wherein the imprinted pattern of features comprises micro-scale or nano-scale patterns; and wherein the micro-scale or nano-scale patterns comprise channels, trenches, posts, wells, or combinations thereof.

### Claim 4 (depends on 1)

The system of claim 1, wherein the second region is not patterned.

### Claim 5 (depends on 1)

The system of claim 1, wherein the first region and the second region have opposite character with regard to hydrophobicity and hydrophilicity.

### Claim 6 (depends on 1)

The system of claim 1, wherein a thickness of the first polymer layer is greater than a thickness of the second polymer layer.

### Claim 7 (depends on 1)

The system of claim 1, wherein the first plurality of functional groups of the first polymer layer is selected from the group consisting of C8-14 cycloalkenes, 8 to 14 membered heterocycloalkenes, C8-14 cycloalkynes, 8 to 14 membered heterocycloalkynes, alkynyl, vinyl, halo, azido, amino, amido, epoxy, glycidyl, carboxyl, hydrazonyl, hydrazinyl, hydroxy, tetrazolyl, tetrazinyl, nitrile oxide, nitrene, nitrone, thiol, and optionally substituted variants and combinations thereof.

### Claim 8 (depends on 1)

The system of claim 1, wherein the first plurality of functional groups of the first polymer layer is selected from the group consisting of halo, azido, alkynyl, carboxyl, epoxy, glycidyl, norbornene, amino, and optionally substituted variants and combinations thereof.

### Claim 9 (depends on 1)

The system of claim 1, further comprising a functionalized molecule, the functionalized molecule comprising a polymer, a hydrogel, an amino acid, a peptide, a nucleoside, a nucleotide, a polynucleotide, a sugar, a protein, or combinations thereof covalently attached to the first polymer layer through reaction with the first plurality of functional groups.

### Claim 10 (depends on 9)

The system of claim 9, wherein the functionalized molecule comprises poly(N-(5-azidoacetamidylpentyl)acrylamide-co-acrylamide) (PAZAM).

### Claim 11 (depends on 10)

The system of claim 10, wherein the functionalized molecule further comprises oligonucleotides covalently bonded to PAZAM.

### Claim 12 (depends on 1)

The system of claim 1, wherein the substrate is selected from the group consisting of a glass substrate, a silica substrate, a quartz substrate, a plastic substrate, a metal substrate, a metal oxide substrate, and combinations thereof.

### Claim 13 (depends on 1)

The system of claim 1, wherein the substrate is a glass substrate.
