Modification method of polyurethane, polyurethane, polishing pad, and modification method of polishing pad
AssigneeKuraray Co., Ltd.
InventorsAzusa Oshita, Mitsuru Kato, Minori Takegoshi, Chihiro Okamoto, Shinya Kato
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Abstract
A modification method of a polyurethane, including the steps of: preparing a polyurethane having an ethylenically unsaturated bond; and treating the polyurethane with a liquid containing a compound having a conjugated double bond, or a modification method of a polyurethane, including the steps of: preparing a polyurethane having a conjugated double bond; and treating the polyurethane with a liquid containing a compound having an ethylenically unsaturated bond is used.
Claims18
A method for modifying a polishing pad, the method comprising:
- preparing a polishing pad comprising in at least a polishing surface thereof, a polyurethane having an ethylenically unsaturated bond;
- and
- treating the polyurethane with a liquid comprising a compound having a conjugated double bond and a functional group selected from the group consisting of a carboxyl group, a metal salt of a carboxyl group, a hydroxyl group, an amino group, a sulfonic acid group, a phosphoric acid group and an imidazole group to obtain a Diels Alder ring substituted with the functional group on the polyurethane.
A method for modifying a polishing pad, the method comprising:
- preparing a polishing pad comprising, in at least a surface thereof, a polyurethane having a conjugated double bond;
- and
- treating the polishing surface with a liquid comprising a compound having an ethylenically unsaturated bond and a functional group selected from the group consisting of a carboxyl group, a hydroxyl group, an amino group, a sulfonic acid group, a phosphoric acid group and an imidazole group to obtain a Diels Alder ring substituted with the functional group on the polyurethane.
Dependencies are inferred from the claim text.