Back to results
US 12,109,530 B2Granted
Waste gas separation and treatment apparatus and control method thereof
AssigneesDasan, Inc., Bong Geum Shin
InventorsBong Geum Shin, Seong Uk Cho
Life of this patent
Estimating the term…
Abstract
The present invention can separate waste gases according to whether they are corrosive or non-corrosive to perform pyrolysis treatment thereof individually, wherein powder fixed to a heating module and a chamber is removed to increase operation efficiency and equipment durability, and the collected powder can be externally discharged even during operation.
Claims7
A waste gas separation and treatment apparatus comprising:
- a waste gas separation part having an inlet opening through which a waste gas enters from a preliminary process, a direction-change valve for changing the direction of flow depending on whether the waste gas entering through the inlet opening is corrosive or non-corrosive, and a first flow pipe and a second flow pipe through which the waste gas flows by means of the direction-change valve;
- a heating tank part including a plurality of heating modules for thermally decomposing the waste gas passed through the first and second flow pipes and a chamber housing the first and second flow pipes;
- a scraper unit installed on the heating tank part, for scraping powder fixed to an inside surface of the chamber;
- a wet cleaning part that communicates with the heating tank part and has a plurality of spray nozzles inside through which a cleaning solution for the wet cleaning of the waste gas passed through the heating tank part is sprayed;
- and
- wherein a heat transfer pipe is provided between the second flow pipe and each of the heating modules and allows a processing gas fed from the preliminary process to be heated through the heating modules and move into the second flow pipe.
3 more elements
A waste gas separation and treatment apparatus comprising:
- a waste gas separation part having an inlet opening through which a waste gas enters from a preliminary process, a direction-change valve for changing the direction of flow depending on whether the waste gas entering through the inlet opening is corrosive or non-corrosive, and a first flow pipe and a second flow pipe through which the waste gas flows by means of the direction-change valve;
- a heating tank part including a plurality of heating modules for thermally decomposing the waste gas passed through the first and second flow pipes and a chamber housing the first and second flow pipes;
- a scraper unit installed on the heating tank part, for scraping powder fixed to an inside surface of the chamber;
- a wet cleaning part that communicates with the heating tank part and has a plurality of spray nozzles inside through which a cleaning solution for the wet cleaning of the waste gas passed through the heating tank part is sprayed;
- wherein the preliminary process comprises a deposition equipment, a waste gas inlet and a vacuum pump,
- the waste gas inlet comprising:
- cleaning gas feed pipes into which different cleaning gases are supplied so as to be fed to the deposition equipment;
- solenoid valves for closing or opening the respective cleaning gas feed pipes;
- and
- pressure sensors connected to the respective solenoid valves, and
- a control valve, wherein the control valve is constructed in such a way as to receive a control signal from the deposition equipment and regulate whether to feed a cleaning gas or not, by which connecting tubes are connected to the respective solenoid valves.
8 more elements
Dependencies are inferred from the claim text.