Cyclotron having continuously variable energy output
AssigneeApplied Materials, Inc.
InventorsFrank Sinclair, Klaus Becker, Joseph C. Olson, Tseh-Jen Hsieh, Morgan Patrick Dehnel, Anand Mathai George
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Abstract
An apparatus may include a cyclotron to receive an ion beam as an incident ion beam at an initial energy, and output the ion beam as an accelerated ion beam at an accelerated ion energy. The apparatus may further include an RF source to output an RF power signal to the cyclotron chamber, the RF power source comprising a variable power amplifier, and a movable stripper, translatable to intercept the ion beam within the cyclotron at a continuum of different positions.
Claims17
An apparatus, comprising:
- a cyclotron to receive an ion beam as an incident ion beam at an initial energy, and to output the ion beam as an accelerated ion beam at an accelerated ion energy;
- an RF source to output an RF power signal to the cyclotron, the RF power source comprising a variable power amplifier;
- and
- a movable stripper, translatable to intercept the ion beam within the cyclotron at a continuum of different positions;
- wherein the RF power signal comprises a composite signal that comprises a first signal having a first frequency and a second signal having a second frequency, the second frequency being an odd harmonic of the first frequency.
An ion implanter, comprising:
- an ion source to generate a negative ion beam, the negative ion beam having an initial ion energy;
- a cyclotron to receive the negative ion beam as an incident ion beam at an incident ion energy, and output the negative ion beam as a positive ion beam at an accelerated ion energy;
- an RF power source to output an RF power signal to the cyclotron, the RF power source comprising a variable power amplifier;
- and
- a movable stripper, translatable to intercept the ion beam within the cyclotron at a continuum of different positions;
- wherein the RF power signal comprises a composite signal that comprises a first signal having a first frequency and a second signal having a second frequency, the second frequency being an odd harmonic of the first frequency.
A method of generating a high energy ion beam, comprising;
- generating a negative ion beam having an initial ion energy;
- accelerating the negative ion beam in a cyclotron chamber of a cyclotron;
- stripping the negative ion beam to generate a positive ion beam, by placing a movable stripper at a predetermined orbit in the cyclotron chamber;
- and
- adjusting an amplitude of an RF voltage that is applied to the cyclotron;
- wherein accelerating the negative ion beam comprises applying an RF power signal to a pair of dees in the cyclotron, wherein the RF power signal comprises a composite signal that comprises a first signal having a first frequency and a second signal having a second frequency, the second frequency being an odd harmonic of the first frequency.
Dependencies are inferred from the claim text.