DFL read head with SiOx cap layer on AlOx refill layers
AssigneeWestern Digital Technologies, Inc.
InventorsYung-Hung Wang, Chih-Ching Hu, Hongxue Liu, Guanxiong Li, Chen-Jung Chien, Ming Mao, Ming Jiang
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AssigneeWestern Digital Technologies, Inc.
InventorsYung-Hung Wang, Chih-Ching Hu, Hongxue Liu, Guanxiong Li, Chen-Jung Chien, Ming Mao, Ming Jiang
Estimating the term…
The present disclosure generally relate to a read head and methods of forming thereof. Upon forming a dual free layer (DFL) sensor and a rear hard bias (RHB) structure on a seed layer, a photoresist is deposited on the DFL read head and the RHB structure. A refill layer is deposited on the photoresist and the seed layer adjacent to the DFL sensor and the RHB structure. Portions of the refill layer disposed on one or more sidewalls of the photoresist are removed, and a SiOx cap layer is deposited on the refill layer and on the one or more sidewalls. The photoresist is removed, and the SiOx cap layer and top surfaces of the DFL sensor and the RHB structure are planarized to form a substantially flat topography. The SiOx cap layer acts as a stop layer for the refill layer, and remains in the finished read head.
A read head, comprising:
A read head, comprising:
A read head, comprising:
Dependencies are inferred from the claim text.