Microwave-assisted magnetic recording (MAMR) head slider with diamoind-like carbon layer and a silicon nitride layer, and related head gimbal assembly and disk drive unit

A microwave-assisted magnetic recording (MAMR) head slider, comprising a slider substrate embedded therein with an MAMR head with a spin torque oscillator, wherein the MAMR head slider further comprises a seed layer formed on the slider substrate and a diamond-like carbon (DLC) layer formed on the seed layer, wherein the seed layer is a silicon nitride (SiN) layer, and a content of nitrogen in the silicon nitride layer is 9%-17%;

• wherein the silicon nitride layer has a first interface adjacent to the diamond-like carbon layer and a second interface adjacent to the substrate, and a content of nitrogen on the second interface is greater than a content of nitrogen on the first interface.

A head gimbal assembly, comprising a microwave-assisted magnetic recording (MAMR) head slider and a cantilever member for supporting the MAMR head slider

• wherein the MAMR head slider comprises a slider substrate embedded therein with an MAMR head with a spin torque oscillator, wherein the MAMR head slider further comprises a seed layer formed on the slider substrate and a diamond-like carbon (DLC) layer formed on the seed layer, wherein the seed layer is a silicon nitride (SiN) layer, and a content of nitrogen in the silicon nitride layer is 9%-17%;
• wherein the silicon nitride layer has a first interface adjacent to the diamond-like carbon layer and a second interface adjacent to the substrate, and a content of nitrogen on the second interface is greater than a content of nitrogen on the first interface.