US 12,105,420 B2 · Coating-type composition for forming organic film, patterning process, polymer, and method for manufacturing polymer

Abstract

The present invention provides a coating-type composition for forming an organic film containing: a polymer having a structure shown by the following general formula (1) as a partial structure; and an organic solvent, where in the formula (1), ring structures Ar1 and Ar2 represent a benzene ring or a naphthalene ring optionally having a substituent, and W1 represents an aryl group having 6 to 30 carbon atoms and optionally having a substituent. This provides a coating-type composition for forming an organic film that can form an organic film having high pattern-curving resistance and high dry-etching resistance, the composition being excellent in solvent solubility and having a low generation of defects.

Claims21

Dependent claims

A coating-type composition for forming an organic film comprising:

a polymer having a partial structure shown by the following general formula (2);
and an organic solvent,
wherein in the formula (2), ring structures Ar1 and Ar2 represent a benzene ring or a naphthalene ring optionally having a substituent, W1 represents an aryl group having 6 to 30 carbon atoms and optionally having a substituent, W2 represents an organic group, the organic group having a structure selected from the group consisting of
W2 is optionally crosslinked to another repeating unit.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

17/183,989Filed 24 Feb 2021

Priority

JP 2020-381655 Mar 2020

Published

US 2021/0278766 A19 Sep 2021

Granted

1 Oct 2024

Term ends

Not estimatedThe source records don’t support an estimate.

Classification35 codes

G03F 7/094
Characterised by structural details, e.g. supports, auxiliary layers: multilayer resist systems, e.g. planarising layers
C08G 61/10
Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes: only aromatic carbon atoms, e.g.…
C08L 65/00
Compositions of macromolecular compounds obtained by reactions forming a carbon-to-carbon link in
C09D 165/00
Coating compositions based on macromolecular compounds obtained by reactions forming a carbon-to-carbon

Coating-type composition for forming organic film, patterning process, polymer, and method for manufacturing polymer

Life of this patent

Coating-type composition for forming organic film, patterning process, polymer, and method for manufacturing polymer

Life of this patent

Abstract

Claims21