Method of forming a photo-cured layer
AssigneeCanon Kabushiki Kaisha
InventorsTeresa Perez Estrada, Timothy Brian Stachowiak
Life of this patent
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Abstract
A method of forming a photo-cured layer on a substrate can include applying a first photocurable composition overlying a first region of the substrate and a second photocurable composition overlying a second region of the substrate and photo-curing the applied compositions, wherein the first region is a center region of the substrate and the second region is an edge region of the substrate, and the second photocurable composition has a higher vapor pressure than the first photocurable composition. The method can have the advantage that the forming of an extrusion within the edge region of the photo-cured layer can be avoided or being kept very low.
Claims21
A method of forming a photo-cured layer on a substrate, comprising:
- applying a first photocurable composition directly overlying a first region of the substrate and a second photocurable composition directly overlying a second region of the substrate, wherein the first region is located at a center region of the substrate and the second region is located at an edge region of the substrate and the first region;
- contacting the first photocurable composition and the second photocurable composition with a template or superstrate;
- photo-curing the first photocurable composition and the second photocurable composition to form the photo-cured layer;
- and
- removing the template or superstrate,
- wherein the second photocurable composition has a higher vapor pressure than the first photocurable composition at room temperature.
A method of forming an article, comprising
- applying a first photocurable composition directly overlying a first region of a substrate and a second photocurable composition directly overlying a second region of the substrate, wherein the first region is a center region of the substrate and the second region is an edge region of the substrate, and the second photocurable composition has a higher vapor pressure than the first photocurable composition at room temperature;
- contacting the first photocurable composition and the second photocurable composition with a template or superstrate;
- photo-curing the first photocurable composition and the second photocurable composition to obtain a photo-cured layer;
- removing the template or superstrate from the photo-cured layer, and
- processing the substrate with the photo-cured layer to make the article.
Dependencies are inferred from the claim text.