Method and apparatus for monitoring beam profile and power
AssigneeASML Netherlands B.V.
InventorsJian Zhang, Ning Ye, DanJing Huang, Bin-Da Chan
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Abstract
A system and a method for monitoring a beam in an inspection system are provided. The system includes an image sensor configured to collect a sequence of images of a beam spot of a beam formed on a surface, each image of the sequence of images having been collected at a different exposure time of the image sensor, and a controller configured to combine the sequence of images to obtain a beam profile of the beam.
Claims20
A system for monitoring a light beam in an inspection system, comprising:
- a light emitter that includes circuitry to emit a light beam onto a surface of a sample and form a beam spot on the surface;
- an image sensor that includes circuitry to collect a sequence of images of the beam spot formed on the surface such that each image of the sequence of images is collected at a different exposure time of the image sensor;
- and
- a controller having one or more processors and a memory, the controller configured to combine the sequence of images to obtain a beam profile of the light beam.
A non-transitory computer-readable medium that stores a set of instructions that is executable by a processor of a system for monitoring a light beam in an inspection system to cause the system to perform a method, the method comprising:
- directing a light beam emitted by a light emitter onto a surface of a sample to form a beam spot on the surface;
- obtaining a sequence of images of the beam spot formed on the surface, wherein each image of the sequence of images is collected by an image sensor at a different exposure time of the image sensor;
- and
- combining the sequence of images to obtain a beam profile of the light beam.
Dependencies are inferred from the claim text.