Interlocking fastening upper electrode assembly having improved fastening force, and plasma device including same

An interlocking fastening upper electrode assembly having an improved fastening force, the assembly comprising:

• an inner and outer tab composite nut coupled to an assembly groove of a silicon electrode and an anodizing plate so as to prevent rotation;
• an inner and outer tab nut assembled into the assembly groove of the silicon electrode and fitted around the inner and outer tab composite nut;
• and
• an assembly module coupled through an inner portion of a through part of the anodizing plate and assembled with the inner and outer tab composite nut in order to fix the anodizing plate provided above the silicon electrode,
• wherein the inner and outer tab composite nut comprises:
• an insertion part inserted into the assembly groove below the inner and outer tab composite nut to be in close contact with an inner surface of the assembly groove;
• a fastening part extended above the insertion part and comprising a tap so as to be fastened to the inner and outer tab nut;
• a rotation prevention part located on the fastening part and coupled to the through part of the anodizing plate to prevent rotation of the inner and outer tab composite nut;
• and a fastening groove having a screw thread so as to allow the assembly module to be fastened through the rotation prevention part, and
• the rotation prevention part protrudes above the silicon electrode and is inserted into the anodizing plate assembled by the assembly module, and the rotation prevention part has an oval shape, or a triangular shape, or a hexagonal shape, or other polygonal shape so as to prevent rotation of the inner and outer tab composite nut, and a gap is generated in the through part to be located around the rotation prevention part, the gap being an empty space remaining after the rotation prevention part is coupled to the through part.