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US 12,103,024 B2Granted
Mask for deposition
AssigneeSamsung Display Co., Ltd.
InventorsDuck Jung Lee, Ji-Hee Son, Sung Soon Im
Life of this patent
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Abstract
A deposition mask including a resin film including first holes, a non-resin layer disposed on the resin film and including second holes corresponding to the first holes, and a protective layer disposed on the non-resin layer and including third holes corresponding to the first holes, wherein the protective layer includes a first portion disposed on a top surface of the non-resin layer, and a second portion covering a side surface of the second holes of the non-resin layer.
Claims20
A deposition mask comprising:
- a resin film including first holes;
- a non-resin layer disposed on the resin film and including second holes corresponding to the first holes, each of the second holes of the non-resin layer including a side surface aligning with an upper side surface of a respective first hole of the first holes of the resin film such that each side surface of the non-resin layer and respective side surface of the resin film together form a single plane;
- and
- a protective layer disposed on the non-resin layer and including third holes corresponding to the first holes, wherein
- the protective layer includes:
- a first portion disposed on a top surface of the non-resin layer;
- and
- a second portion covering a side surface of the second holes of the non-resin layer.
5 more elements
Dependencies are inferred from the claim text.