Apparatuses and methods for testing semiconductor circuitry using microelectromechanical systems switches

A method for performing testing on a semiconductor circuitry using an apparatus coupled between the semiconductor circuitry and testing equipment, the method comprising:

• controlling a plurality of microelectromechanical systems (MEMS) switches of the apparatus to operate in a first state to enable a direct current (DC) path between the semiconductor circuitry and the testing equipment;
• when the DC path is enabled, performing a direct current (DC) test on the semiconductor circuitry using the DC path;
• controlling the plurality of MEMS switches to operate in a second state to enable a radio frequency (RF) path;
• and
• when the RF path is enabled, performing a radio frequency (RF) test on the semiconductor circuitry using the RF path;
• wherein the plurality of MEMS switches comprise:
• a first MEMS switch coupled to a first terminal of a plurality of first terminals configured to be coupled to the semiconductor circuitry and configured to connect or disconnect a first signal line of the RF path;
• and
• a second MEMS switch coupled to a second terminal of the plurality of first terminals and configured to connect or disconnect the first signal line of the RF path;
• wherein the first terminal and the second terminal are configured to be respectively coupled to a a transmitter (Tx) pin and a receiver Rx pin of the semiconductor circuitry so that the first signal line of the RF path, when connected, extends between the Tx pin and the Rx pin of the semiconductor circuitry and through the first MEMS switch and the second MEMS switch.

An apparatus comprising:

• a microelectromechanical systems (MEMS) switch block comprising:
• a plurality of common terminals configured to be respectively coupled to a plurality of test pins of a semiconductor circuit;
• a plurality of first terminals configured to be coupled to a direct current (DC) test equipment;
• a plurality of second terminals;
• a plurality of first MEMS switches each configured to be coupled to a respective one of the plurality of common terminals and a respective one of the plurality of first terminals to connect or disconnect a respective DC signal line from a respective test pin of the semiconductor circuit to the test equipment;
• and
• a plurality of second MEMS switches each configured to be coupled to a respective one of the plurality of common terminals and a respective one of the plurality of second terminals, wherein a first MEMS switch and a second MEMS switch of the plurality of second MEMS switches are configured to connect or disconnect a radio frequency (RF) signal line between a first test pin and a second test pin of the semiconductor circuit;
• wherein the MEMS switch block is configured to:
• operate in a first state, wherein each of the plurality of first MEMS switches is configured to connect the respective DC signal line from the respective test pin of the semiconductor circuit to the test equipment, and wherein the first MEMS switch and the second MEMS switch of the plurality of second MEMS switches are configured to disconnect the RF signal line between the first test pin and the second test pin of the semiconductor circuit;
• and
• operate in a second state, wherein each of the plurality of first MEMS switches is configured to disconnect the respective DC signal line from the respective test pin of the semiconductor circuit to the test equipment, and wherein the first MEMS switch and the second MEMS switch of the plurality of second MEMS switches are configured to connect the RF signal line between the first test pin and the second test pin of the semiconductor circuit;
• wherein each of the plurality of test pins of the semiconductor circuit is a transmitter (Tx) pin or a receiver (Rx) pin such that:
• when the MEMS switch block operates in the first state, the DC signal lines connected respectively by each of the plurality of first MEMS switches facilitate a DC contact test for the plurality of test pins of the semiconductor circuit;
• and
• when the MEMS switch block operates in the second state, the RF signal line facilitates RF loopback path to enable RF test for the semiconductor circuit.