Mechanical property measuring apparatus, mechanical property measuring method, substance manufacturing equipment, substance management method, and substance manufacturing method

A mechanical property measurement method comprising:

• measuring a plurality of physical quantities of a measurement object that includes a substance and a film on a surface of the substance;
• calculating, using a plurality of calculation models each for calculating a mechanical property of the substance and at least two of the plurality of physical quantities measured, the mechanical property of the substance for each of the plurality of calculation models;
• and
• selecting, as the mechanical property of the substance, one mechanical property out of a plurality of mechanical properties of the substance calculated, based on the at least two of the plurality of physical quantities.

A substance manufacturing equipment comprising:

• a manufacturing equipment configured to manufacture a substance;
• and
• a mechanical property measurement device,
• wherein the mechanical property measurement device includes:
• a physical quantity measurement unit configured to measure a plurality of physical quantities of a measurement object that includes the substance and a film on a surface of the substance;
• a mechanical property calculator configured to calculate, using a plurality of calculation models each for calculating a mechanical property of the substance and at least two of the plurality of physical quantities measured, the mechanical property of the substance for each of the plurality of calculation models;
• and
• a selection processor configured to select, as the mechanical property of the substance, one mechanical property out of a plurality of mechanical properties of the substance calculated, based on the at least two of the plurality of physical quantities, and
• the mechanical property measurement device is configured to measure the mechanical property of the substance manufactured by the manufacturing equipment.

A substance management method comprising:

• measuring a plurality of physical quantities of a measurement object that includes a substance and a film on a surface of the substance;
• calculating, using a plurality of calculation models each for calculating a mechanical property of the substance and at least two of the plurality of physical quantities measured, the mechanical property of the substance for each of the plurality of calculation models;
• selecting, as the mechanical property of the substance, one mechanical property out of a plurality of mechanical properties of the substance calculated, based on the at least two of the plurality of physical quantities;
• and
• classifying the substance based on the selected mechanical property of the substance.

A substance manufacturing method comprising:

• a manufacturing step of manufacturing a substance;
• measuring a plurality of physical quantities of a measurement object that includes the substance manufactured and a film on a surface of the substance;
• calculating, using a plurality of calculation models each for calculating a mechanical property of the substance and at least two of the plurality of physical quantities measured, the mechanical property of the substance for each of the plurality of calculation models;
• and
• selecting, as the mechanical property of the substance, one mechanical property out of a plurality of mechanical properties of the substance calculated, based on the at least two of the plurality of physical quantities.