Thermal conductivity estimation method, thermal conductivity estimation apparatus, production method for semiconductor crystal product, thermal conductivity calculator, thermal conductivity calculation program, and, thermal conductivity calculation method

A thermal conductivity estimation apparatus comprising:

• a measurement unit configured to heat a part of a component, which is prepared as a measurement sample, of a production apparatus of a semiconductor crystal product under a predetermined heating condition and measure a temperature distribution of a surface of the measurement sample under a steady state;
• a calculation unit configured to perform a heat-transfer simulation for a plurality of combinations of provisional thermal conductivities and heating conditions of a sample model of the same shape as the measurement sample to calculate a temperature distribution of the surface of the sample model for each of the plurality of combinations;
• a machine learning unit configured to make a regression model using a machine learning technique on a basis of training data, the training data being defined by the plurality of combinations used in the heat-transfer simulation and a calculation result of the temperature distribution obtained from the plurality of combinations, an input of the regression model comprised of the temperature distribution of the surface of the measurement sample, an output of the regression model comprised of the thermal conductivity of the measurement sample;
• and
• an estimation unit configured to input a result of the measurement of the temperature distribution of the surface of the measurement sample into the regression model to estimate the thermal conductivity of the measurement sample.