Device and method for measuring short-wavelength characteristic X-ray diffraction based on array detection

A device for measuring short-wavelength characteristic X-ray diffraction based on array detection, comprising an X-ray irradiation system, a sample table and an X-ray detection system, wherein

• the X-ray irradiation system comprises a radiation source and an incident collimator (2), the radiation source comprises a heavy metal target X-ray tube (1) with an atomic number greater than 55, a high-voltage power supply with a power supply voltage greater than 160kv, and a controller;
• X-rays emitted by the X-ray irradiation system pass through the incident collimator (2) to form an incident X-ray beam (7), and the incident X-ray beam (7) irradiates a to-be-measured part inside a sample fixed on the sample table;
• the X-ray detection system comprises a receiving collimator (4) and an array detector (5) matched with the receiving collimator (4);
• the array detector (5) is configured to detect and receive a diffraction ray (8) that is diffracted by the to-be-measured part inside the sample and passes through a through hole A (6) of the receiving collimator (4), and other stray rays passing through the through hole A (6) of the receiving collimator (4);
• an extension line of a first inner cone edge (61) of the through hole A (6) intersects with an extension line of a second inner cone edge (62) of the through hole A (6) at an intersection point on a central line of the incident X-ray beam (7), the intersection point is a center of a diffractometer circle of the device, and the to-be-measured part inside the sample is placed at the center of the diffractometer circle of the device;
• each of detection pixels of the array detector (5) is configured to perform single-photon measurement, the array detector (5) is a multi-energy array detector with two or more energy thresholds, and each of the detection pixels is capable of measuring one or more short-wavelength characteristic X-ray based on predetermined energy thresholds;
• or the array detector (5) is an energy dispersive array detector;
• a through hole B (21) of the incident collimator (2) is a circular hole or a rectangular hole;
• a length of the incident collimator (2) ranges from 20 mm to 200 mm;
• a divergence of the incident collimator (2) ranges from 0.02° to 05°;
• a length of the receiving collimator (4) ranges from 100 mm to 1200 mm;
• an angle between the first inner cone edge (61) of the through hole A(6) and the incident X-ray beam (7) is represented by γ, and γ ranges from 2° to 10°;
• an angle between the first inner cone edge (61) of the through hole A(6) and the second inner cone edge (62) of the through hole A(6) is represented by δ, and δ ranges from 0.5° to 6°;
• and
• a sum of γ and δ is not greater than 12°.