Drift tube electrode arrangement having direct current optics

A linear accelerator, comprising:

• a plurality of acceleration stages, wherein at least one acceleration stage of the plurality of acceleration stages comprises:
• a drift tube assembly, to conduct an ion beam along a beam propagation direction;
• a resonator coil, the resonator coil comprising a conductive wall that is coupled to deliver an RF voltage to a powered drift tube of the drift tube assembly;
• and
• a DC electrode assembly, comprising:
• a conductor line, arranged within the resonator coil, and electrically isolated from the resonator coil;
• and
• a DC electrode arrangement, connected to the conductor line and disposed within the powered drift tube, and electrically isolated from the powered drift tube.

An ion implanter, comprising:

• an ion source, to generate an ion beam;
• and
• a linear accelerator, disposed to receive the ion beam, the linear accelerator comprising:
• a plurality of acceleration stages, wherein at least one acceleration stage of the plurality of acceleration stages comprises:
• a drift tube assembly, to conduct an ion beam along a beam propagation direction;
• a resonator coil, the resonator coil comprising a conductive wall that is coupled to deliver an RF voltage to a powered drift tube of the drift tube assembly;
• and
• a DC electrode assembly, comprising:
• a conductor line, arranged within the resonator coil, and electrically isolated from the resonator coil;
• and
• a DC electrode arrangement, connected to the conductor line and disposed within the powered drift tube, and electrically isolated from the powered drift tube.