Integrated optical filter and photodetector and methods of fabricating the same
AssigneeHewlett Packard Enterprise Development LP
InventorsYuan Yuan, Zhihong Huang, Di Liang, Xiaoge Zeng
Life of this patent
Estimating the term…
Loading patent…
AssigneeHewlett Packard Enterprise Development LP
InventorsYuan Yuan, Zhihong Huang, Di Liang, Xiaoge Zeng
Estimating the term…
Integrated optical filter and photodetectors and methods of fabrication thereof are described herein according to the present disclosure. An example of an integrated optical filter and photodetector described herein includes a substrate, an insulator layer on the substrate, and a semiconductor layer on the insulator layer. An optical filter having a resonant cavity is formed in or on the semiconductor layer. The integrated optical filter and photodetector further includes two first metal fingers and a second metal finger interdigitated between the two first metal fingers on the semiconductor layer forming Schottky barriers. The first metal fingers are constructed from a different metal relative to the second metal finger.
An integrated optical filter and photodetector comprising:
A method of forming an integrated optical filter and photodetector, the method comprising:
An optical system comprising:
Dependencies are inferred from the claim text.