Analysis method

An analysis method using a scanning transmission electron microscope including:

• (a) an annular first detector that detects dark field images in a sample by accelerating electron beams emitted from a beam radiator, irradiating the sample so that focal points of the electron beams are located on the sample, and detecting electron beams transmitted through the sample or scattered from the sample;
• and (b) a second detector that detects electron diffraction images of the sample at radiation positions of the electron beams by detecting electron beams transmitted through a hollow portion of the first detector among the electron beams transmitted through the sample or scattered from the sample, the method comprising:
• scanning a plurality of radiation points in an analysis area on a surface of the sample by sequentially radiating the electron beams at preset incidence angles;
• and
• detecting the dark field images of the analysis area and detecting the electron diffraction image at each of the plurality of radiation points at the same time.