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US 12,094,675 B2Granted
Arrangement of MEMS switches
AssigneeRobert Bosch GmbH
InventorsFranziska Lambrecht, Markus Schwarz
Life of this patent
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Abstract
Various embodiments include an arrangement comprising a plurality of MEMS switches with movable elements. The plurality of MEMS switches are connected to one another in a total-cross-tied configuration.
Claims9
An arrangement comprising:
- a plurality of microelectricalmechanical system (MEMS) switches, each switch comprising one or more movable elements;
- wherein the plurality of MEMS switches are connected to one another in a total-cross-tied configuration including a plurality of rows extending along a first axis and a plurality of columns extending orthogonally to the first axis;
- wherein each row of the plurality of rows comprises a first set of series connections between all of the individual MEMS switches in a respective row and each of the individual MEMS switches in a respective column are connected in parallel, creating a redundant layout of MEMS switches with increased dielectric strength in comparison to individual MEMS switches and increased current capacity in comparison to individual MEMS switches.
Dependencies are inferred from the claim text.