Test apparatus and test method thereof

A test apparatus, comprising:

• a sample stage to support a sample, the sample stage being movable to adjust a position of the sample in a direction parallel to an upper surface of the sample stage;
• a plurality of tips including a first tip, at least one second tip, and at least one third tip that have different shapes from each other, the first tip being configured to perform pre-profiling to obtain surface information of the sample, the at least one second tip being configured to perform milling on the sample supported on the sample stage, and the at least one third tip being configured to perform profiling on the sample supported on the sample stage;
• a tip stage connected to a cantilever, the cantilever being coupled to one of the plurality of tips, and the tip stage being configured to adjust a position of the cantilever in a first direction perpendicular to the upper surface of the sample stage to alternately perform profiling and milling on the sample supported on the sample stage;
• a position sensor configured to obtain information about a positional relationship between a selected tip for alternately performing the profiling or and the milling among the plurality of tips and the sample supported on the sample stage;
• a stage controller configured to control movements of the sample stage and the tip stage based on the information about the positional relationship;
• and
• a tip controller configured to select the selected tip for performing the profiling or the milling on the sample supported on the sample stage and to determine conditions for performing the milling on the sample supported on the sample stage.

A test apparatus, comprising:

• a sample stage to support a sample, the sample stage being movable to adjust a position of the sample in a direction parallel to an upper surface of the sample stage;
• a plurality of test units above the sample stage, each of the plurality of test units including:
• a tip configured to perform profiling or milling on the sample supported on the sample stage until reaching a predetermined depth,
• a tip stage connected to a cantilever, the cantilever being coupled to the tip, and the tip stage being configured to adjust a position of the cantilever in a first direction perpendicular to the upper surface of the sample stage to alternately perform profiling and milling on the sample supported on the sample stage,
• a position sensor configured to obtain information about a positional relationship between the tip and the sample, and
• a stage controller configured to control a movement of the tip stage based on the information about the positional relationship;
• and
• a tip controller configured to select a test unit to alternately perform the profiling or and the milling on the sample supported on the sample stage from among the plurality of test units, and to determine conditions for the milling on the sample supported on the sample stage based on a relationship between a distance between the tip and the sample and a force between the tip and the sample,
• wherein the tips in the plurality of test units have different shapes from each other.