Optical inspection device

An optical inspection device comprising:

• a light selection unit that has three or more wavelength selection regions selectively transmitting or reflecting light rays of mutually different wavelength regions;
• a detection element that detects scattering characteristic information of the light rays having reached a light receiving surface via the light selection unit;
• and
• a first imaging element that causes scattered light composed at least of two light rays and scattered by a subject arranged between the first imaging element and an irradiation unit irradiating the subject with light emitted from a light source, to enter the light receiving surface arranged on an image plane of the subject with respect to the first imaging element via the light selection unit, wherein
• the three or more wavelength selection regions is different in azimuth angle with respect to an optical axis of the first imaging element,
• the light selection unit is arranged on a focal plane of the first imaging element and has mechanisms of selecting the light rays to transmit or reflect the light rays and making the light rays to have different wavelengths selectively according to the three or more wavelength selection regions, and
• the detection element
• includes, for each pixel, a plurality of wavelength filters the number of which is more than the number of the wavelength selection regions provided in the light selection unit, the plurality of wavelength filters selectively transmitting light rays having mutually different wavelengths, and
• by using the plurality of wavelength filters provided in the detection element, detects the scattering characteristic information including at least two different directions at a same time and detects the scattering characteristic information including the at least two different directions to capture spectral images enabling identifying wavelength selection regions having transmitted or reflected the light rays having reached the light receiving surface.