Sensor, strain detection sensor, pressure sensor, and microphone

A sensor comprising:

• a film portion that is deformable by external force;
• a support body supporting the film portion;
• and
• a plurality of magnetoresistive element portions on the film portion and each including at least one unit element;
• wherein
• the at least one unit element includes a first magnetic layer whose magnetization direction changes in accordance with deformation of the film portion, a second magnetic layer whose magnetization direction is fixed, and an intermediate layer between the first magnetic layer and the second magnetic layer;
• the film portion includes a plurality of side portions defining an outer edge of the film portion;
• a slit portion is provided in the film portion and includes portions along the plurality of side portions, so that the film portion includes a plurality of connection portions in which the plurality of side portions are partially connected to the support body;
• the plurality of magnetoresistive element portions are respectively located in the plurality of connection portions;
• and
• a bridge circuit is defined by the plurality of magnetoresistive element portions provided in the plurality of connection portions.

A sensor comprising:

• a film portion that is deformable by external force;
• a support body supporting the film portion;
• and
• a plurality of magnetoresistive element portions on the film portion and each including at least one unit element;
• wherein
• the at least one unit element includes a first magnetic layer whose magnetization direction changes in accordance with deformation of the film portion, a second magnetic layer whose magnetization direction is fixed, and an intermediate layer between the first magnetic layer and the second magnetic layer;
• the film portion includes a plurality of side portions defining an outer edge of the film portion;
• a slit portion is provided in the film portion and includes portions along the plurality of side portions, so that the film portion includes a plurality of connection portions in which the plurality of side portions are partially connected to the support body;
• the plurality of magnetoresistive element portions are respectively located in the plurality of connection portions;
• each of the plurality of connection portions includes one end on one side in a direction along the outer edge of the film portion and another end on another side in the direction along the outer edge of the film portion;
• the slit portion includes, in each of the plurality of side portions, a first slit portion extending from the one end of each of the plurality of connection portions toward the one side and a second slit portion extending from the another end of each of the plurality of connection portions toward the another side;
• and
• the first slit portion on one connection portion side of the plurality of connection portions adjacent to each other in a circumferential direction of the film portion and the second slit portion on another connection portion side of the plurality of connection portions are coupled to each other.