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US 12,092,460 B2Granted
Silicon MEMS gyroscopes with upper and lower sense plates
AssigneeThe Charles Stark Draper Laboratory, Inc.
InventorsEugene H. Cook, Jonathan J. Bernstein, Mirela G. Bancu, Marc Steven Weinberg, William Sawyer
Life of this patent
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Abstract
Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.
Claims12
A tuning fork gyroscope sensor, comprising:
- a silicon sense plate wafer including a silicon handle layer including vias for electrical connections, wherein the silicon sense plate wafer is a silicon on insulator (SOI) wafer;
- a silicon proof mass wafer, including a proof mass, bonded to the silicon sense plate wafer;
- and
- a sealing ring around the proof mass.
1 more element
A tuning fork gyroscope sensor, comprising:
- a silicon sense plate wafer including a silicon handle layer including vias for electrical connections;
- a silicon proof mass wafer bonded to the silicon sense plate wafer;
- and
- a sealing ring around the proof mass, wherein a volumetric region in the sealing ring and around the proof mass is evacuated.
1 more element
A tuning fork gyroscope sensor, comprising:
- a silicon sense plate wafer including a silicon handle layer including vias for electrical connections;
- and
- a silicon proof mass wafer bonded to the silicon sense plate wafer;
- wherein the sense plate is a conductive polysilicon layer deposited on an insulating layer.
1 more element
Dependencies are inferred from the claim text.