Methods of making a self-assembled slow-wave structures

A method of making a slow-wave structure, the method comprising:

• forming a dielectric support membrane on a device substrate;
• forming a sacrificial film on a portion of a surface of the dielectric support membrane;
• forming a scaffold film comprising a strained dielectric material on a portion of a surface of the sacrificial film;
• forming a plurality of parallel, electrically conductive strips on the scaffold film, each of the electrically conductive strips having a leading end and a trailing end, wherein an edge of the scaffold film or the trailing ends of the electrically conductive strips are attached to the dielectric support membrane;
• selectively removing the sacrificial film underlying the scaffold film, wherein the scaffold film relaxes and rolls into a cylinder, bringing the electrically conducting strips into an end-to-end arrangement that forms a helix on an interior surface of the cylinder;
• electroplating a surface of the helix with an electrically conductive material;
• forming a first electrically conductive contact in electrical communication with a first end of the helix;
• and
• forming a second electrically conductive contact in electrical communication with a second end of the helix.