Sample stand and method for manufacturing sample stand
AssigneeKioxia Corporation
InventorKazuya Hatano
Life of this patent
Estimating the term…
Abstract
A sample stand includes a base portion that is made of a first material and has an arcuate outer edge in a plane having a first direction and a second direction orthogonal to the first direction, a first portion that is provided on an upper portion of the base portion in the second direction and in which a second material is embedded, a second portion that is provided on the upper portion of the base portion in the second direction and in which a third material is embedded, and a sample holding portion on which a sample is to be held. The sample holding portion is provided on the upper portion of the base portion in the second direction, between the first portion and the second portion in a third direction orthogonal to each of the first direction and the second direction.
Claims20
A sample stand comprising:
- a base portion that is made of a first material and has an arcuate outer edge in a plane having a first direction and a second direction orthogonal to the first direction;
- a first portion that is provided on an upper portion of the base portion in the second direction and in which a second material, different from the first material, is embedded;
- a second portion that is provided on the upper portion of the base portion in the second direction and in which a third material, different from the first material, is embedded;
- and
- a sample holding portion on which a sample is to be held, wherein the sample holding portion is provided on the upper portion of the base portion in the second direction, between the first portion and the second portion in a third direction orthogonal to each of the first direction and the second direction.
A method for manufacturing a sample stand, the method comprising:
- punching a first material to produce a base portion having an arcuate outer edge in a plane having a first direction and a second direction orthogonal to the first direction;
- forming a first groove portion and a second groove portion at an upper end of the base portion in the second direction;
- embedding a resin material containing an element having a chemical element number smaller than that of the first material in the first groove portion and the second groove portion and curing the resin material;
- and
- carbonizing the resin material embedded in the first groove portion and the second groove portion.
Dependencies are inferred from the claim text.