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US 12,088,064 B2Granted
Reflector for VCSEL
AssigneeII-Vi Delaware, Inc.
InventorsJean Axel Edmond Teissier, Ludovic Maurice Emile Marigo, Wilfried Maineult
Life of this patent
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Abstract
A vertical cavity surface emitting laser (VCSEL) may include an active region (e.g., one or more quantum wells) and a chirped pattern reflector. The active region may be configured to be electrically pumped such that the active region generates light having a fundamental mode and a higher order mode. The chirped pattern reflector may include a first portion presenting to the active region as a first portion of an effective mirror having a concave shape and a second portion presenting to the active region as a second portion of the effective mirror having a convex shape.
Claims17
A vertical cavity surface emitting laser (VCSEL) comprising:
- an active region configured to be electrically pumped to generate light having a fundamental mode and a higher order mode;
- a first reflector disposed adjacent one side of the active region, the first reflector comprising a plurality of parts concentrically arranged around an axis of symmetry A of the VCSEL, each concentric part having a spatial variation that changes at distances from the axis of symmetry A, the concentric parts configured to exhibit a phase retardation Φ as a function of a radius r from the axis of symmetry A, wherein:
- within a radius r0 of the axis of symmetry A, the concentric parts are structured to present a concave portion of an effective mirror to the active region and exhibit a phase retardation Φ(r) given by
- Φ
-
- (
- r
- )
- =
- 2
-
- π
- λ
-
- (
- f
- +
- λ
- 2
-
- π
-
- Φ
- Max
- -
- r
- 2
- +
- f
- 2
- )
-
- Mod
-
- 2
-
- π
- ,
- and
- outside the radius r0 from the axis of symmetry A, the concentric parts are structured to present a convex portion of the effective mirror to the active region and exhibit a phase retardation Φ(r) given by
- Φ
-
- (
- r
- )
- =
- 2
-
- π
- λ
-
- (
- -
- f
- ′
- +
- λ
- 2
-
- π
-
- Φ
- Max
- -
- r
- 2
- +
- f
- ′2
- )
-
- Mod
-
- 2
-
- π
- ;
- and
- a second reflector disposed adjacent another side of the active region opposite the first reflector, where:
- λ represents a wavelength of the fundamental mode in a vacuum;
- f represents a focal length of the concave portion of the effective mirror;
- f′ represents a focal length of the convex portion of the effective mirror;
- and
- ΦMax represents a maximal phase retardation.
81 more elements
A vertical cavity surface emitting laser (VCSEL) comprising:
- an active region configured to be electrically pumped such that the active region generates light having a fundamental mode and a higher order mode;
- and
- an optical cavity having the active region and being bounded by:
- a distributed Bragg reflector;
- and
- a first reflector comprising a plurality of parts concentrically arranged around an axis of symmetry A of the VCSEL, each concentric part having a spatial variation that changes at distances from the axis of symmetry A, the concentric parts configured to exhibit a phase retardation Φ as a function of a radius r relative to the axis of symmetry A such that:
- within a radius r0 of the axis of symmetry A, the concentric parts are structured to present a concave portion of an effective mirror to the active region, reflect the fundamental mode such that a stability of the fundamental mode is increased within the optical cavity, and exhibit a phase retardation Φ(r) given by
- Φ
-
- (
- r
- )
- =
- 2
-
- π
- λ
-
- (
- f
- +
- λ
- 2
-
- π
-
- Φ
- Max
- -
- r
- 2
- +
- f
- 2
- )
-
- Mod
-
- 2
-
- π
- outside the radius r0 from the axis of symmetry A, the concentric parts are structured to present a convex portion of the effective mirror to the active region, diverge the higher order mode, and exhibit a phase retardation Φ(r) given by
- Φ
-
- (
- r
- )
- =
- 2
-
- π
- λ
-
- (
- f
- ′
- +
- λ
- 2
-
- π
-
- Φ
- Max
- -
- r
- 2
- +
- f
- ′
- 2
- )
-
- Mod
-
- 2
-
- π
- λ represents a wavelength of the fundamental mode in a vacuum;
- f represents a focal length of the concave portion of the effective mirror;
- f′ represents a focal length of the convex portion of the effective mirror;
- and
- ΦMax represents a maximal phase retardation.
80 more elements
A method of fabricating a vertical cavity surface emitting laser (VCSEL), the method comprising, not necessarily in sequence, the steps of:
- forming a first reflector by:
- forming a distributed Bragg reflector;
- and
- forming a structuration for a reflector adjacent the distributed Bragg reflector;
- forming an optical cavity adjacent the first reflector, the optical cavity having an active region configured to be electrically pumped such that the active region generates light having a fundamental mode and a higher order mode;
- and
- forming a second reflector adjacent the optical cavity by concentrically arranging a plurality of parts around an axis of the VCSEL, each concentric part having a spatial variation that changes at distances from the axis of the VCSEL, with:
- (i) a central portion of the parts located about the axis of the VCSEL to present a concave portion of an effective mirror to the active region and configuring the central portion to reflect the fundamental mode such that a stability of the fundamental mode is increased within the optical cavity, and
- (ii) a peripheral portion of the parts spaced apart from the axis of the VCSEL to present a convex portion of the effective mirror to the active region and configuring the peripheral portion to diverge the higher order mode.
6 more elements
Dependencies are inferred from the claim text.