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US 12,087,615 B2Granted
Method for manufacturing a film on a support having a non-flat surface
AssigneeSoitec
InventorsBruno Ghyselen, Jean-Marc Bethoux
Life of this patent
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Abstract
A method for manufacturing a film on a support having a non-flat surface comprises: providing a donor substrate having a non-flat surface, forming an embrittlement zone in the donor substrate so as to delimit the film to be transferred, forming the support by deposition on the non-flat surface of the film to be transferred, and detaching the donor substrate along the embrittlement zone so as to transfer the film onto the support.
Claims19
A structure, comprising:
- a donor substrate including an embrittlement zone delimiting a superficial film, wherein the embrittlement zone is free of bubbles;
- and
- a support covering the superficial film,
- wherein the superficial film comprises a first surface adjacent the support and a second surface opposite the support,
- wherein the first surface of the superficial film adjacent the support comprises a predefined geometry comprising recessed patterns.
2 more elements
A structure, comprising:
- a donor substrate including an embrittlement zone delimiting a superficial film, wherein the embrittlement zone is free of bubbles;
- and
- a support covering the superficial film,
- wherein the superficial film comprises a first surface adjacent the support and a second surface opposite the support,
- wherein the first surface of the superficial film adjacent the support comprises a predetermined geometry that is intentionally textured and not flat.
2 more elements
Dependencies are inferred from the claim text.