Variable inductor for plasma generator

A system for waveform control, comprising:

• a power supply having an input terminal and at least one output terminal, the at least one output terminal configured to be coupled to a load;
• a controller;
• a variable inductor configured to be coupled to one of the at least one output terminal of the power supply, the variable inductor comprising a first magnetic core, the first magnetic core comprising a plurality of arms, including at least a first inductor arm and a first control arm, wherein an inductance winding having one or more turns is wound around the first inductor arm, and wherein a first control winding comprising one or more turns is wound around the first control arm;
• and
• a DC current source configured to be coupled to the first control arm and the controller, and wherein the controller is configured to adjust a DC bias applied by the DC current source to the first control arm to control an output waveform at the at least one output terminal of the power supply;
• wherein the variable inductor is a triple E variable inductor, and wherein the first magnetic core comprises an inductor core section having the first inductor arm and a control core section having the first control arm.

A system for waveform control, comprising:

• a power supply having an input terminal and at least one output terminal, the at least one output terminal configured to be coupled to a load;
• a controller;
• a variable inductor configured to be coupled to one of the at least one output terminal of the power supply, the variable inductor comprising a first magnetic core, the first magnetic core comprising a plurality of arms, including at least a first inductor arm and a first control arm, wherein an inductance winding having one or more turns is wound around the first inductor arm, and wherein a first control winding comprising one or more turns is wound around the first control arm;
• and
• a DC current source configured to be coupled to the first control arm and the controller, and wherein the controller is configured to adjust a DC bias applied by the DC current source to the first control arm to control an output waveform at the at least one output terminal of the power supply;
• wherein the variable inductor is a quadruple U variable inductor, the quadruple U variable inductor further comprising:
• a second magnetic core having a second inductor arm, a second control arm, and another inductance winding having one or more turns wound around the second inductor arm;
• and wherein the first and the second magnetic core are separated by a spacer, and wherein the first control winding is wound around the spacer and the first and the second control arm.